Patents by Inventor John J. Helmsen

John J. Helmsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-purpose processing chamber with removable chamber liner
    Patent number: 7011039
    Abstract: A multi-purpose chamber that can be configured for a variety of processes, including deposition processes and etch processes, for example, by installing one or more removable chamber liners. The multi-purpose chamber provides uniform plasma confinement around a substrate disposed in the chamber for various processing conditions. The multi-purpose chamber also provides efficient and uniform exhaust of processing gas from the chamber.
    Type: Grant
    Filed: July 7, 2000
    Date of Patent: March 14, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Jonathan D. Mohn, John J. Helmsen, Michael Barnes