Abstract: A microelectronic battery is formed from Zn/Air technology as a volumetric energy storage device from soft lithography techniques. The microelectric battery includes an anode and a cathode disposed in an electrolyte tank having a volume <1 mm3 that is filled with an electrolyte.

Abstract: A MEMS volumetric lithium-ion battery formed using a soft lithography technique. The battery includes a reduced footprint area with a corresponding increase in capacity by exploiting the Z dimension through increased volume, while utilizing a chemistry capable of one Joule per cubic millimeter. The battery may be manufactured to cell sizes of one millimeter and cell volumes of one cubic millimeter. The battery can be formed into battery banks, electrically connected in series and parallel, and integrated into a system-on-a-chip. The battery may also be implemented for on-board applications and is suitable for space, air, and terrestrial applications, and in particular, for providing a MEMS volumetric battery.

Abstract: A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.

Abstract: A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.

Abstract: A microelectronic battery which provides increased battery capacity relative to known thin film batteries without the need for increasing the footprint. In order to provide increased capacity, the microelectronic battery in accordance with the present invention is formed from Zn/Air technology as a volumetric energy storage device. As a volumetric energy storage device, the height dimension of the device may be increased relative to known thin film batteries to provide increased battery capacity without the need to increase the footprint dimensions. As such, the microelectronic battery in accordance with the present invention is suitable for various applications which require a relatively high capacity power supply with a relatively small footprint.