Abstract: A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.

Abstract: A filter housing for retaining a roomside replaceable filter is generally provided. In one embodiment, the filter housing includes one or more sidewalls defining an interior volume. Each sidewall includes a first section and an adjacent second section sealingly coupled thereto. A sealing member is coupled to the second section and extends into the interior volume. The sealing member is adapted to provide a gas-tight seal between with a replaceable filter and the filter housing. A hole is disposed through at least one of the first or second sections. The first section is sealed to the second section around a perimeter of the hole.