Patents by Inventor John Lystad
John Lystad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9919863Abstract: An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates.Type: GrantFiled: October 17, 2013Date of Patent: March 20, 2018Assignee: ENTEGRIS, INC.Inventors: John Lystad, Steven P. Kolbow
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Patent number: 9745119Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: GrantFiled: December 23, 2013Date of Patent: August 29, 2017Assignee: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, David L. Halbmaier, John Lystad
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Publication number: 20150266660Abstract: An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates.Type: ApplicationFiled: October 17, 2013Publication date: September 24, 2015Applicant: ENTEGRIS, INC.Inventors: John Lystad, Steven P. Kolbow
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Publication number: 20150041359Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.Type: ApplicationFiled: May 19, 2014Publication date: February 12, 2015Applicant: Entegris, Inc.Inventors: Anthony Mathius Tieben, John Lystad, David L. Halbmaier
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Publication number: 20140183076Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: ApplicationFiled: December 23, 2013Publication date: July 3, 2014Applicant: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, David L. Halbmaier, John Lystad
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Patent number: 8727125Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.Type: GrantFiled: February 5, 2008Date of Patent: May 20, 2014Assignee: Entegris, Inc.Inventors: Anthony Mathius Tieben, John Lystad, David L. Halbmaier
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Patent number: 8613359Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: GrantFiled: July 30, 2012Date of Patent: December 24, 2013Assignee: Entegris, Inc.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Publication number: 20130020220Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: ApplicationFiled: July 30, 2012Publication date: January 24, 2013Applicant: ENTEGRIS, INC.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Patent number: 8231005Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: GrantFiled: September 27, 2006Date of Patent: July 31, 2012Assignee: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Publication number: 20090301917Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: ApplicationFiled: September 27, 2006Publication date: December 10, 2009Applicant: ENTEGRIS, INC.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Patent number: 7578407Abstract: A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion.Type: GrantFiled: April 17, 2005Date of Patent: August 25, 2009Assignee: Entegris, Inc.Inventors: Anthony Mathius Tieben, John Lystad
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Publication number: 20080121560Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.Type: ApplicationFiled: February 5, 2008Publication date: May 29, 2008Applicant: ENTEGRIS, INC.Inventors: Anthony Mathius Tieben, John Lystad, David L. Halbmaier
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Patent number: 7328727Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.Type: GrantFiled: April 17, 2005Date of Patent: February 12, 2008Assignee: Entegris, Inc.Inventors: Anthony Mathius Tieben, John Lystad, David L. Halbmaier
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Publication number: 20050252827Abstract: A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.Type: ApplicationFiled: April 17, 2005Publication date: November 17, 2005Inventors: Anthony Tieben, John Lystad, David Halbmaier
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Publication number: 20050230284Abstract: A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion.Type: ApplicationFiled: April 17, 2005Publication date: October 20, 2005Inventors: Anthony Tieben, John Lystad
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Patent number: D465782Type: GrantFiled: May 31, 2001Date of Patent: November 19, 2002Assignee: ADC Telecommunications, Inc.Inventors: David J. Johnsen, John Lystad