Patents by Inventor John M. Aitken
John M. Aitken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8035200Abstract: A semiconductor structure. The semiconductor structure includes a semiconductor layer, a charge accumulation layer on top of the semiconductor layer, a doped region in direct physical contact with the semiconductor layer; and a device layer on and in direct physical contact with the charge accumulation layer. The charge accumulation layer includes trapped charges of a first sign. The doped region and the semiconductor layer forms a P?N junction diode. The P?N junction diode includes free charges of a second sign opposite to the first sign. The trapped charge in the charge accumulation layer exceeds a preset limit above which semiconductor structure is configured to malfunction. A first voltage is applied to the doped region. A second voltage is applied to the semiconductor layer. A third voltage is applied to the device layer. The third voltage exceeds the first voltage and the second voltage.Type: GrantFiled: June 3, 2010Date of Patent: October 11, 2011Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan Harrison Cannon, Alvin Wayne Strong
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Patent number: 7943482Abstract: A design structure is provided for a semiconductor device having radiation hardened buried insulators and isolation insulators in SOI technology. The device includes a first structure and a second structure. The first structure includes: a radiation hardened BOX layer under an active device layer; radiation hardened shallow trench isolation (STI) structures between active regions of the active device layer and above the radiation hardened BOX layer; metal interconnects in one or more interlevel dielectric layers above gates structures of the active regions. The second structure is bonded to the first structure. The second structure includes: a Si based substrate; a BOX layer on the substrate; a Si layer with active regions on the BOX; oxide filled STI structures between the active regions of the Si layer; and metal interconnects in one or more interlevel dielectric layers above gates structures. At least one metal interconnect is electrically connecting the first structure to the second structure.Type: GrantFiled: August 6, 2008Date of Patent: May 17, 2011Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon
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Patent number: 7935609Abstract: A method is provided for fabricating a semiconductor device and more particularly to a method of manufacturing a semiconductor device having radiation hardened buried insulators and isolation insulators in SOI technology. The method includes removing a substrate from an SOI wafer and selectively removing a buried oxide layer formed as a layer between the SOI wafer and active regions of a device. The method further comprises selectively removing isolation oxide formed between the active regions, and replacing the removed buried oxide layer and the isolation oxide with radiation hardened insulators.Type: GrantFiled: August 6, 2008Date of Patent: May 3, 2011Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon
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Publication number: 20110068423Abstract: The disclosure relates generally to photodetectors and methods of forming the same, and more particularly to optical photodetectors. The photodetector includes a waveguide having a radius that controls the specific wavelength or specific range of wavelengths being detected. The disclosure also relates to a design structure of the aforementioned.Type: ApplicationFiled: September 18, 2009Publication date: March 24, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: John M. Aitken
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Patent number: 7880158Abstract: The present invention relates to a nonvolatile memory such as, for example a ROM or an EPROM, in which the information density of the memory is increased relative to a conventional nonvolatile memory that includes two logic state devices. Specifically, the nonvolatile memory of the present invention includes a SiN/TaN/SiN thin film resistor embedded within a material having a thermal conductivity of about 1 W/m-K or less; and a non-linear Si-containing device coupled to the resistor. Read and write circuits and operations are also provided in the present application.Type: GrantFiled: April 24, 2008Date of Patent: February 1, 2011Assignee: International Business Machines CorporationInventors: John M. Aitken, Fen Chen, Kai D. Feng
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Publication number: 20100237475Abstract: A semiconductor structure. The semiconductor structure includes a semiconductor layer, a charge accumulation layer on top of the semiconductor layer, a doped region in direct physical contact with the semiconductor layer; and a device layer on and in direct physical contact with the charge accumulation layer. The charge accumulation layer includes trapped charges of a first sign. The doped region and the semiconductor layer forms a P-N junction diode. The P-N junction diode includes free charges of a second sign opposite to the first sign. The trapped charge in the charge accumulation layer exceeds a preset limit above which semiconductor structure is configured to malfunction. A first voltage is applied to the doped region. A second voltage is applied to the semiconductor layer. A third voltage is applied to the device layer. The third voltage exceeds the first voltage and the second voltage.Type: ApplicationFiled: June 3, 2010Publication date: September 23, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John M. Aitken, Ethan Harrison Cannon, Alvin Wayne Strong
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Patent number: 7791169Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: GrantFiled: April 18, 2008Date of Patent: September 7, 2010Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
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Patent number: 7736915Abstract: A method for neutralizing trapped charges in a buried oxide layer. The method includes providing a semiconductor structure which includes (a) a semiconductor layer, (b) a charge accumulation layer on top of the semiconductor layer, and (c) a doped region in direct physical contact with the semiconductor layer, wherein the charge accumulation layer comprises trapped charges of a first sign, and wherein the doped region and the semiconductor layer form a P-N junction diode. Next, free charges are generated in the P-N junction diode, wherein the free charges are of a second sign opposite to the first sign. Next, the free charges are accelerated towards the charge accumulation layer, resulting in some of the free charges entering the charge accumulation layer and neutralizing some of the trapped charges in the charge accumulation layer.Type: GrantFiled: February 21, 2006Date of Patent: June 15, 2010Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan Harrison Cannon, Alvin Wayne Strong
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Patent number: 7715248Abstract: The present invention relates to a nonvolatile memory such as, for example a ROM or an EPROM, in which the information density of the memory is increased relative to a conventional nonvolatile memory that includes two logic state devices. Specifically, the nonvolatile memory of the present invention includes a SiN/TaN/SiN thin film resistor embedded within a material having a thermal conductivity of about 1 W/m-K or less; and a non-linear Si-containing device coupled to the resistor. Read and write circuits and operations are also provided in the present application.Type: GrantFiled: April 24, 2008Date of Patent: May 11, 2010Assignee: International Business Machines CorporationInventors: John M. Aitken, Fen Chen, Kai D. Feng
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DESIGN STRUCTURE FOR SEMICONDUCTOR DEVICE HAVING RADIATION HARDENED INSULATORS AND STRUCTURE THEREOF
Publication number: 20100032795Abstract: A design structure is provided for a semiconductor device having radiation hardened buried insulators and isolation insulators in SOI technology. The device includes a first structure and a second structure. The first structure includes: a radiation hardened BOX layer under an active device layer; radiation hardened shallow trench isolation (STI) structures between active regions of the active device layer and above the radiation hardened BOX layer; metal interconnects in one or more interlevel dielectric layers above gates structures of the active regions. The second structure is bonded to the first structure. The second structure includes: a Si based substrate; a BOX layer on the substrate; a Si layer with active regions on the BOX; oxide filled STI structures between the active regions of the Si layer; and metal interconnects in one or more interlevel dielectric layers above gates structures. At least one metal interconnect is electrically connecting the first structure to the second structure.Type: ApplicationFiled: August 6, 2008Publication date: February 11, 2010Inventors: John M. AITKEN, Ethan H. CANNON -
Publication number: 20100035393Abstract: A method is provided for fabricating a semiconductor device and more particularly to a method of manufacturing a semiconductor device having radiation hardened buried insulators and isolation insulators in SOI technology. The method includes removing a substrate from an SOI wafer and selectively removing a buried oxide layer formed as a layer between the SOI wafer and active regions of a device. The method further comprises selectively removing isolation oxide formed between the active regions, and replacing the removed buried oxide layer and the isolation oxide with radiation hardened insulators.Type: ApplicationFiled: August 6, 2008Publication date: February 11, 2010Inventors: John M. Aitken, Ethan H. Cannon
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Patent number: 7601602Abstract: An on-chip, ultra-compact, and programmable semiconductor resistor device and device structure and a method of fabrication. Each semiconductor resistor device structure is formed of one or more conductively connected buried trench type resistor elements exhibiting a precise resistor value. At least two semiconductor resistor device structures may be connected in series or in parallel configuration through the intermediary of one or more fuse devices that may be blown to achieve a desired total resistance value.Type: GrantFiled: July 6, 2006Date of Patent: October 13, 2009Assignee: International Business Machines CorporationInventors: John M. Aitken, Fen Chen, Timothy D. Sullivan
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Publication number: 20080232159Abstract: The present invention relates to a nonvolatile memory such as, for example a ROM or an EPROM, in which the information density of the memory is increased relative to a conventional nonvolatile memory that includes two logic state devices. Specifically, the nonvolatile memory of the present invention includes a SiN/TaN/SiN thin film resistor embedded within a material having a thermal conductivity of about 1 W/m-K or less; and a non-linear Si-containing device coupled to the resistor. Read and write circuits and operations are also provided in the present application.Type: ApplicationFiled: April 24, 2008Publication date: September 25, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John M. Aitken, Fen Chen, Kai D. Feng
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Publication number: 20080197337Abstract: The present invention relates to a nonvolatile memory such as, for example a ROM or an EPROM, in which the information density of the memory is increased relative to a conventional nonvolatile memory that includes two logic state devices. Specifically, the nonvolatile memory of the present invention includes a SiN/TaN/SiN thin film resistor embedded within a material having a thermal conductivity of about 1 W/m-K or less; and a non-linear Si-containing device coupled to the resistor. Read and write circuits and operations are also provided in the present application.Type: ApplicationFiled: April 24, 2008Publication date: August 21, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: John M. Aitken, Fen Chen, Kai D. Feng
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Publication number: 20080191314Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: ApplicationFiled: April 18, 2008Publication date: August 14, 2008Applicant: International Busines Machines CorporationInventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
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Patent number: 7388274Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: GrantFiled: August 15, 2007Date of Patent: June 17, 2008Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
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Patent number: 7381981Abstract: The present invention relates to a nonvolatile memory such as, for example a ROM or an EPROM, in which the information density of the memory is increased relative to a conventional nonvolatile memory that includes two logic state devices. Specifically, the nonvolatile memory of the present invention includes a SiN/TaN/SiN thin film resistor embedded within a material having a thermal conductivity of about 1 W/m-K or less; and a non-linear Si-containing device coupled to the resistor. Read and write circuits and operations are also provided in the present application.Type: GrantFiled: July 29, 2005Date of Patent: June 3, 2008Assignee: International Business Machines CorporationInventors: John M. Aitken, Fen Chen, Kai D. Feng
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Patent number: 7315075Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: GrantFiled: January 26, 2005Date of Patent: January 1, 2008Assignee: International Business Machines CorporationInventors: John M Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
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Patent number: 7084483Abstract: An on-chip, ultra-compact, and programmable semiconductor resistor device and device structure and a method of fabrication. Each semiconductor resistor device structure is formed of one or more conductively connected buried trench type resistor elements exhibiting a precise resistor value. At least two semiconductor resistor device structures may be connected in series or in parallel configuration through the intermediary of one or more fuse devices that may be blown to achieve a desired total resistance value.Type: GrantFiled: May 25, 2004Date of Patent: August 1, 2006Assignee: International Business Machines CorporationInventors: John M. Aitken, Fen Chen, Timothy D. Sullivan
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Patent number: 7064414Abstract: A structure and associated method for annealing a trapped charge from a semiconductor device. The semiconductor structure comprises a substrate and a first heating element. The substrate comprises a bulk layer, an insulator layer and a device layer. The first heating element is formed within the bulk layer. A first side of the first heating element is adjacent to a first portion of the insulator layer. The first heating element is adapted to be selectively activated to generate thermal energy to heat the first portion of the insulator layer and anneal a trapped electrical charge from the first portion of the insulator layer.Type: GrantFiled: November 12, 2004Date of Patent: June 20, 2006Assignee: International Business Machines CorporationInventors: John M Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong