Patents by Inventor John Mariner
John Mariner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11105567Abstract: A thermal management assembly comprising a bulk graphene material and a metal-based coating layer disposed on opposing surfaces of the bulk graphene core material comprising an agent that is reactive with the graphene to form a carbide. The metal-based coating layer can serve as an outer layer of the assembly or can serve to bond the graphene to other materials encapsulating the graphene core. The metal-based coating layer with the reactive agent provides an assembly exhibiting excellent thermal conductivity properties and greatly improved thermal interface resistance.Type: GrantFiled: September 24, 2013Date of Patent: August 31, 2021Assignee: Momentive Performance Materials Quartz, Inc.Inventors: Wei Fan, Xiang Liu, John Mariner, Aaron Rape
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Patent number: 10347559Abstract: A high thermal conductivity/low coefficient of thermal expansion thermally conductive composite material for heat sinks and an electronic apparatus comprising a heat sink formed from such composites. The thermally conductive composite comprises a high thermal conductivity layer disposed between two substrates having a low coefficient of thermal expansion. The substrates have a low coefficient of thermal expansion and a relatively high modulus of elasticity, and the composite exhibits high thermal conductivity and low coefficient of thermal expansion even for composites with high loadings of the thermally conductive material.Type: GrantFiled: March 16, 2011Date of Patent: July 9, 2019Assignee: MOMENTIVE PERFORMANCE MATERIALS INC.Inventors: Wei Fan, Xiang Liu, John Mariner
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Publication number: 20150253089Abstract: A thermal management assembly comprising a bulk graphene material and a metal-based coating layer disposed on opposing surfaces of the bulk graphene core material comprising an agent that is reactive with the graphene to form a carbide. The metal-based coating layer can serve as an outer layer of the assembly or can serve to bond the graphene to other materials encapsulating the graphene core. The metal-based coating layer with the reactive agent provides an assembly exhibiting excellent thermal conductivity properties and greatly improved thermal interface resistance.Type: ApplicationFiled: September 24, 2013Publication date: September 10, 2015Inventors: Wei Fan, Xiang Liu, John Mariner, Aaron Rape
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Patent number: 8512806Abstract: A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.Type: GrantFiled: August 12, 2008Date of Patent: August 20, 2013Assignee: Momentive Performance Materials Inc.Inventors: John Mariner, Douglas A. Longworth, Donald William Pultz, Jr., Feng Liao, David M. Rusinko, Zhong-Hao Lu, Timothy J. Hejl
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Publication number: 20120315405Abstract: A hot wire chemical vapor deposition apparatus for use in depositing thin films such as amorphous or epitaxial silicon upon a surface of a wafer or substrate by cracking a source or precursor gas such as silane. The apparatus includes a vacuum chamber and a source of precursor gas operable to inject the precursor gas into the chamber. The HWCVD apparatus also includes a heater with a support surface exposed to the deposition chamber, and the heater is operable to heat a substrate positioned upon the support surface. The apparatus includes a catalytic decomposition assembly with a filament positioned between the heater and the precursor gas inlet for selectively passing a current through the filament to resistively heat material of the filament. The filament material may be carbide such as tantalum carbide, which may be coated on a graphite core.Type: ApplicationFiled: February 25, 2011Publication date: December 13, 2012Applicant: ALLIANCE FOR SUSTAINABLE ENERGY, LLCInventors: Marc Landry, Ina Martin, Maxim Shub, Charles Teplin, John Mariner, James Portugal
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Publication number: 20120234524Abstract: A high thermal conductivity/low coefficient of thermal expansion thermally conductive composite material for heat sinks and an electronic apparatus comprising a heat sink formed from such composites. The thermally conductive composite comprises a high thermal conductivity layer disposed between two substrates having a low coefficient of thermal expansion. The substrates have a low coefficient of thermal expansion and a relatively high modulus of elasticity, and the composite exhibits high thermal conductivity and low coefficient of thermal expansion even for composites with high loadings of the thermally conductive material.Type: ApplicationFiled: March 16, 2011Publication date: September 20, 2012Inventors: Wei Fan, Xiang Liu, John Mariner
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Patent number: 7901509Abstract: A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.Type: GrantFiled: October 16, 2006Date of Patent: March 8, 2011Assignee: Momentive Performance Materials Inc.Inventors: John Mariner, Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan
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Publication number: 20100326645Abstract: A thermally conductive laminate comprising a first substrate, a second substrate, and a performance layer disposed between the first substrate and the second substrate. The performance layer comprising thermal pyrolytic graphite (TPG) and vias. The TPG board surface and the vias may be at least partially filled with a material comprising at least one of thermally conductive epoxy, soldering metal/alloy or brazing metal/alloy. In addition, the thermally conductive laminate may not contain a framing structure surrounding the performance layer.Type: ApplicationFiled: September 8, 2010Publication date: December 30, 2010Inventors: Wei Fan, Xiang Liu, John Mariner
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Publication number: 20100071614Abstract: A fluid distribution apparatus and method of forming such an apparatus is provided. A fluid distribution apparatus includes a body, a plenum, an inlet, and an outlet. The body is formed from at least one of a nitride, carbide, carbonitride, oxynitride of elements comprising boron, aluminum, silicon, gallium, refractory hard metals, transition metals, and rare earth metals, or complexes or combinations thereof. The plenum is positioned within the body. The inlet passes through a first portion of the body and is in fluid communication with the plenum, and the outlet passes through a second portion of the body and is also in fluid communication with the plenum.Type: ApplicationFiled: September 22, 2008Publication date: March 25, 2010Inventors: John Mariner, Marc Schacpkens, David Michael Rusinko
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Publication number: 20100040780Abstract: A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.Type: ApplicationFiled: August 12, 2008Publication date: February 18, 2010Inventors: John Mariner, Douglas A. Longworth, Donald William Pultz, JR., Feng Liao, David M. Rusinko, Zhong-Hao Lu, Timothy J. Hejl
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Publication number: 20080066676Abstract: A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.Type: ApplicationFiled: October 16, 2006Publication date: March 20, 2008Applicant: General Electric CompanyInventors: John Mariner, Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan
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Patent number: 7221860Abstract: A vacuum heater assembly for heating fluids flowing within; the assembly comprises an inner member having a heating surface with an average cross-sectional area with an aspect ratio of at least 2. The inner member is disposed within an outer member and with a vacuum drawn in the space between the inner member and the outer member, the heat transfers toward the center of the inner member, heating the fluids flowing within.Type: GrantFiled: November 4, 2005Date of Patent: May 22, 2007Assignee: Momentive Performance Materials Inc.Inventors: Kensuke Fujimura, John Mariner
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Publication number: 20060237441Abstract: A vacuum heater assembly for heating fluids flowing within; the assembly comprises an inner member having a heating surface with an average cross-sectional area with an aspect ratio of at least 2. The inner member is disposed within an outer member and with a vacuum drawn in the space between the inner member and the outer member, the heat transfers toward the center of the inner member, heating the fluids flowing within.Type: ApplicationFiled: November 4, 2005Publication date: October 26, 2006Inventors: Kensuke Fujimura, John Mariner
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Publication number: 20060127067Abstract: A thermal control device for wafer processing which comprises a) a platform for placement of an object of various sizes to be heated, b) at least a shaft extending substantially transverse to the platform; and c) a plurality of resistance heating elements patterned in a plurality of circuits defining at least one zone for independent controlled heating of objects of varying sizes on the platform.Type: ApplicationFiled: November 8, 2005Publication date: June 15, 2006Inventors: Eric Wintenberger, Sridhar Prasad, John Mariner, Zhong-Hao Lu
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Publication number: 20050064230Abstract: The invention relates to a feedstock material for use in making heat spreaders, comprising a sheet of annealed pyrolytic graphite having a thermal conductivity of greater than 1000 watts/m-K, a size in any dimension of at least 5 cm and a thickness of at least 0.2 mm. In one embodiment, the feedstock is made by hot-pressing a stack of alternate layers of pyrolytic graphite sheets with flat graphite dies for a finished sheet of annealed pyrolytic graphite comprising a plurality of layers being parallel to each other of at least 0.075 degrees per mm of thickness. In another embodiment, the finished sheet of annealed pyrolytic graphite is made by graphitizing a stack of films comprising a high-carbon polymer.Type: ApplicationFiled: January 21, 2004Publication date: March 24, 2005Inventors: Haluk Sayir, John Mariner
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Publication number: 20050064247Abstract: A composite coating for use on semi-conductor processing components, comprising a refractory metal carbide coating with its surface modified by at least one of: a) a carbon donor source for a stabilized stoichiometry, and b) a layer of nitride, carbonitride or oxynitride of elements selected from a group B, Al, Si, refractory metals, transition metals, rare earth metals which may or may not contain electrically conducting pattern, and wherein the metal carbide is selected from the group consisting of silicon carbide, tantalum carbide, titanium carbide, tungsten carbide, silicon oxycarbide, zirconium carbide, hafnium carbide, lanthanum carbide, vanadium carbide, niobium carbide, magnesium carbide, chromium carbide, molybdenum carbide, beryllium carbide and mixtures thereof. The composite coating is characterized as having an improved corrosion resistance property and little emissivity sensitivity to wavelengths used in optical pyrometry under the normal semi-conductor processing environments.Type: ApplicationFiled: June 24, 2004Publication date: March 24, 2005Inventors: Ajit Sane, Jeffrey Lennartz, Jon Leist, Daniel Kotabish, John Mariner, Andrew Macey, Douglas Longworth, Timothy Hejl, Thomas Devan
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Patent number: 5220858Abstract: Apparatus and method for cutting partially through the layers of a laminate. The invention uses a roller having a resilient surface of specified hardness over which are stretched a number of wires extending helically about its circumference, so that the wires are supported on the tool surface by the resilient layer. A cooperating hard surfaced roller applies a controlled amount of pressure to the sheet material in a nip formed with the scoring roller. This arrangement provides highly even score lines.Type: GrantFiled: October 9, 1992Date of Patent: June 22, 1993Assignee: Samuel Jones & Co. LimitedInventors: Roger A. Allen, John Mariner
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Patent number: RE46136Abstract: A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.Type: GrantFiled: March 8, 2013Date of Patent: September 6, 2016Assignee: MOMENTIVE PERFORMANCE MATERIALSInventors: John Mariner, Ajit Sane, Toshiki Ebata, Marc Schaepkens, Xiang Liu, Wei Fan