Patents by Inventor John Monroe Daniel

John Monroe Daniel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEPOSITION RING AND COVER RING TO EXTEND PROCESS COMPONENTS LIFE AND PERFORMANCE FOR PROCESS CHAMBERS
    Publication number: 20090050272
    Abstract: A deposing ring and cover ring for extending process components life and performance for process chambers are disclosed. A deposition ring including a protruding surface is positioned in spaced apart relation with a cover ring including a depressed surface. Indicated surfaces of the deposition ring and cover ring may be covered with a coating to improve adhesion of deposited materials.
    Type: Application
    Filed: August 20, 2008
    Publication date: February 26, 2009
    Inventors: REED WARREN ROSENBERG, David P. Laube, John Monroe Daniel, John Gilbert Deem