Patents by Inventor John M. Urata

John M. Urata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for adjustment of partial coherence of light energy in an imaging system
    Patent number: 7139135
    Abstract: The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: November 21, 2006
    Assignee: Intel Corporation
    Inventors: Michael Goldstein, John M. Urata
  • Enhancing light coupling efficiency for ultra high numerical aperture lithography through first order transmission optimization
    Publication number: 20040165271
    Abstract: A first order transmission optimization (FOTO) top coat may be provided on a photoresist layer to improve the coupling efficiency of first order diffracted light waves during a lithographic imaging operation. The top coat may be a relatively thin layer of a relatively low absorption, low refractive index material. The top coat may be provided in addition to a bottom anti-reflective coating (BARC).
    Type: Application
    Filed: February 21, 2003
    Publication date: August 26, 2004
    Inventors: Christof Gabriel Krautschik, Maciek E. Orczyk, John M. Urata
  • Adjustment of the partial coherence of the light energy in an imaging system
    Publication number: 20040008424
    Abstract: The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
    Type: Application
    Filed: June 11, 2003
    Publication date: January 15, 2004
    Inventors: Michael Goldstein, John M. Urata
  • Adjustment of the partial coherence of the light energy in an imaging system
    Patent number: 6611387
    Abstract: The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: August 26, 2003
    Assignee: Intel Corporation
    Inventors: Michael Goldstein, John M. Urata