Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

Abstract: Described are wound-pleated filters and methods of preparing and using these filters.

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

Abstract: Articles, such as various operative components of a fluid delivery and storage system, incorporating a composite including a fluoropolymer matrix having regions of perfluorinated distributed within the matrix into their construction. The tubing and various operative components incorporating the composite are electrostatic dissipative in nature having a surface resistivity ranging from between 1×104 ohms/square and 1×1012 ohms/square.

Abstract: Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

Abstract: The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.

Abstract: The present invention relates to a nanofilter formed by using a porous ultrafiltration membrane as a precursor, and carefully controlling reaction conditions so as to maintain sufficient hydrophilic nature of the membrane while causing the pore structure to close to a nanofilter range (less than 400 Daltons). This produces a solvent stable cellulose nanofiltration membrane capable of operating at satisfactory flux in aqueous solutions, and being low binding to organic biomaterials.

Abstract: The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Abstract: The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Abstract: This disclosure relates to connection systems for fluid connections. Even more particularly, some embodiments relate to fluid connections for use with semiconductor manufacturing fluids. The connection system uses a connection nut (110) that seals fluid fittings (112, 114) with less than 360 degrees of rotation of the connection nut by making use of multi-start threads in the nut (110). According to one embodiment, the connection nut creates at least 360 degrees of threaded engagement with less than 360 degrees of rotation. Embodiments further provide connection systems that can seal multiple ports simultaneously.

Abstract: The present invention relates to a nanofilter formed by using a porous ultrafiltration membrane as a precursor, and carefully controlling reaction conditions so as to maintain sufficient hydrophilic nature of the membrane while causing the pore structure to close to a nanofilter range (less than 400 Daltons). This produces a solvent stable cellulose nanofiltration membrane capable of operating at satisfactory flux in aqueous solutions, and being low binding to organic biomaterials.

Abstract: The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.

Abstract: The present disclosure relates to modular filtration systems using removable filter cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filtration system may include a removable filter cassette having a filter inlet port and a filter outlet port, a filter cassette holder configured to receive and retain the filter cassette, and a main assembly. The main assembly can further comprise a filter inlet interface port configured to receive the filter inlet port, and a filter outlet interface port configured to receive the filter outlet port and can define flow paths to direct flow to and from the filter cassette. The filter cassette holder may be movably coupled to the main assembly such that the filter cassette is movable relative to the main assembly from an unmated position to a mated position.

Abstract: The present disclosure relates to purification cassettes that have reinforcing features. One embodiment relates to a purification cassette with tensions members. A purification system may include a removable cassette defining a media cavity. A set of tension members may span between a first sidewall and second sidewall. The set of tension members can divide the media cavity into a plurality of lanes.

Abstract: Sorption reinforced catalytic coating system for the degradation of threat agents including a synzyme coating about a material configured for the degradation of the threat agents, the synzyme coating including bucket-shaped molecules configured for the sorption of the threat agents A binding agent is configured for synzyme immobilization to maximize loading and retention of the synzyme coating on the material.

Abstract: Sorption reinforced catalytic coating system for the degradation of threat agents including a synzyme coating about a material, the synzyme coating having bucket-shaped molecules for the sorption and degradation of the threat agents. A binding agent is configured for synzyme immobilization to maximize loading and retention of the synzyme coating on the material.

Abstract: A self-decontaminating metal organic framework including an acid linked to a metal producing a metal organic framework configured for the sorption of chemical warfare agents and/or toxic industrial chemicals, the metal organic framework including reactive sites for the degradation of the agents and chemicals.

Abstract: Sorption reinforced catalytic coating system for the degradation of threat agents including a synzyme coating about a material, the synzyme coating having bucket-shaped molecules for the sorption and degradation of the threat agents. A binding agent is configured for synzyme immobilization to maximize loading and retention of the synzyme coating on the material.

Abstract: Sorption reinforced catalytic coating system for the degradation of threat agents including a synzyme coating about a material, the synzyme coating having bucket-shaped molecules for the sorption and degradation of the threat agents. A binding agent is configured for synzyme immobilization to maximize loading and retention of the synzyme coating on the material.