Abstract: An apparatus for particle implantation is disclosed employing a plurality of particle generators to effectively process wafers of other target substrates carried on a rotating end station. The invention is particularly useful in SIMOX processes where implanted oxygen ions form a buried oxide layer in silicon wafers. In one embodiment, two or more stationary particle generators are disposed at different sectors of a circular track along which the wafers travel to expose the wafers in sequence as they pass. The ion sources can also be offset regularly from each other to increase the radial exposure area. In an other embodiment, the apparatus can further include at least one particle generator which scans the rotating end station in a radial direction as it rotates to insure that uniform ion doses are achieved.

Abstract: A dose measurement system for ion implantation equipment based on the thermal energy deposited by the ion beam on a calibrated mass which periodically intercepts the beam. The method is insensitive to the ambient electrons which are present in the ion implanter volume. The method is also independent of processes in which the energetic ion changes its charge along its beam path. Thus, the invention solves problems of conventional does measuring system based on charge collection requiring exclusion of free electrons from the collector and compensation for the component of the implanted beam which is un-ionized and hence unrecorded by the charge collector. The simplicity and compactness of the calorimeter method has further advantages, in particular, the calorimeter solves the problem of making dose measurements in restricted spaces.

Abstract: Methods and apparatus for recording information with a reciprocating stylus assembly provide a mass which preferably corresponds to the mass of the stylus assembly. The stylus assembly and the provided mass are jointly reciprocated in phase opposition to each other, whereby stylus assembly vibrations are practically eliminated and the recording system is dynamically balanced.