Patents by Inventor John P. Zajac

John P. Zajac has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mass flow stabilized
    Patent number: 4958658
    Abstract: A mass flow stabilizer utilizes a restriction and a chamber for the dampening of pressure fluctuations between a gas pressure regulator and a mass flow controller.
    Type: Grant
    Filed: June 25, 1987
    Date of Patent: September 25, 1990
    Assignee: Tegal Corporation
    Inventor: John P. Zajac
  • Automatic shutoff valve
    Patent number: 4547248
    Abstract: A plasma reactor system is described in which modularity is enhanced through automatic shutoff valves for gas lines, enabling components to be exchanged readily. Gas lines are routed through a connector at a predetermined location for all modules. The connector comprises a valve member for each line.
    Type: Grant
    Filed: March 12, 1984
    Date of Patent: October 15, 1985
    Assignee: Tegal Corporation
    Inventors: Roger B. Lachenbruch, John P. Zajac
  • Modular plasma reactor with local atmosphere
    Patent number: 4539062
    Abstract: A plasma reactor system is described in which a plurality of components are segregated into modules. Devices known as mass flow controllers for gas supply lines are located one each per module. A plenum for inert gas is connected to each module to bath the module in an inert atmosphere.
    Type: Grant
    Filed: March 12, 1984
    Date of Patent: September 3, 1985
    Assignee: Tegal Corporation
    Inventor: John P. Zajac