Abstract: A method of measuring a feature with a probe microscope. The feature comprises a base, an entrance, and a pair of opposed side walls. The feature is filled with a liquid. The probe microscope comprises a cantilever and a probe tip extending from the cantilever. The method comprises: inserting the probe tip into the feature via the entrance; and performing a measurement of the feature by contacting the base of the feature with the probe tip.

Abstract: A method of measuring a sample with a probe including a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever is disclosed. The method includes taking a series of measurements of a sidewall of the sample with the probe; and analysing the series of measurements to determine a characteristic of the sidewall. The measurements are taken during a measurement cycle that includes a pair of measurement drive phases. The measurement drive phases include first and second drive phases in which the probe is driven, respectively, down, then up, next to the sidewall. During one of the drive phases the probe tip interacts with the sidewall, and the series of measurements are taken by measuring an angle of the cantilever as the probe tip interacts with the sidewall during the one of the drive phases.

Abstract: A probe microscope comprising a probe array with an array of probes, each probe comprising a cantilever and a probe tip. A lighting system comprises a plurality of light sources. Each light source is configured to output a respective light beam. A lens array comprises an array of lenses. Each source lens is positioned to receive a respective one of the light beams from the lighting system. A collector lens is configured to collect the light beams from the lens array. An objective lens is configured to receive the light beams from the collector lens and focus each light beam onto the cantilever of a respective one of the probes. The lighting system is configured to modulate a power of the light beams to actuate the probes, and the lighting system is configured to modulate the power of some or all of the light beams independently.

Abstract: Disclosed is a method of calibrating apparatus for optically characterizing samples of particles of small size. Also disclosed is a method of estimating the concentration of particles in a population of small size particles.

Abstract: Disclosed is a method of calibrating apparatus for optically characterising samples of particles of small size. Also disclosed is a method of estimating the concentration of particles in a population of small size particles.

Abstract: The present invention provides a method of analyzing a sample comprising sub-micron particles, comprising determining first information about the size of particles and number of particles in the sample by nanoparticle tracking analysis; determining second information about average particle size of particles in the sample by dynamic light scattering; determining from the first information third information representing the theoretical effect of the detected particles on results obtainable by dynamic light scattering; and adjusting the second information using the third information to produce fourth information representing adjusted information on average particle size.

Abstract: The present invention provides a method of analysing a sample comprising sub-micron particles, comprising determining first information about the size of particles and number of particles in the sample by nanoparticle tracking analysis; determining second information about average particle size of particles in the sample by dynamic light scattering; determining from the first information third information representing the theoretical effect of the detected particles on results obtainable by dynamic light scattering; and adjusting the second information using the third information to produce fourth information representing adjusted information on average particle size.