Patents by Inventor John Paul Babinski

John Paul Babinski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 3976330
    Abstract: The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect treated wafers in segregated lots. The enclosed system is at a positive pressure to avoid ambient contamination. The enclosed track system further embodies a device for the combined computerized control of individual wafer routing in the system, humidity, temperature, and particulate content of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions.
    Type: Grant
    Filed: October 1, 1975
    Date of Patent: August 24, 1976
    Assignee: International Business Machines Corporation
    Inventors: John Paul Babinski, Bruce Irving Bertelsen, Karl Heinz Raacke, Valdeko Harry Sirgo, Clarence Jay Townsend