Abstract: A system for measuring temperatures of and controlling a multi-zone heating plate in a substrate support assembly used to support a semiconductor substrate in a semiconductor processing includes a current measurement device and switching arrangements. A first switching arrangement connects power return lines selectively to an electrical ground, a voltage supply or an electrically isolated terminal, independent of the other power return lines. A second switching arrangement connects power supply lines selectively to the electrical ground, a power supply, the current measurement device or an electrically isolated terminal, independent of the other power supply lines. The system can be used to maintain a desired temperature profile of the heater plate by taking current readings of reverse saturation currents of diodes serially connected to planar heating zones, calculating temperatures of the heating zones and powering each heater zone to achieve the desired temperature profile.

Abstract: A method of operating a heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus, wherein the heating plate comprises power supply lines and power return lines and respective heater zone connected between every pair of power supply line and power return line. The method reduces maximum currents carried by the power supply lines and power return lines by temporally spreading current pulses for powering the heater zones.

Abstract: A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, branch transmission lines, common transmission lines and vias. The heating plate is capable of being driven by AC current or direct current phase alternating power, which has an advantage of minimizing DC magnetic field effects above the substrate support assembly and reduce plasma non-uniformity caused by DC magnetic fields.

Abstract: A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.

Abstract: The present invention provides a tunable laser with a compact form factor and precise tuning to any selected center wavelength of a selected wavelength grid. A novel tuning technique is disclosed which includes tuning the laser to selected passbands, as well as tuning the optical path length of the laser utilizing a variety of tuning elements and a feedback circuit working together.

Abstract: Methods, compositions and kits are disclosed. The compositions are light emitting and comprise a polymeric matrix having dissolved therein a photoactive compound. The composition has the characteristic that, after activation of the photoactive compound, the rate of decrease in the intensity of light emission at any time during a 20-fold decrease in the intensity is proportional to the intensity of the light emission. In one embodiment the polymeric matrix is comprised of particles of about 20 nm to about 100 ?m in diameter to which is bound a specific binding pair member. The particles generally comprise a polymeric matrix having dissolved therein about 1 to about 20% by weight of a dopant. The compositions may be used in methods for determining an analyte. A combination is provided comprising (1) a medium suspected of containing the analyte, (2) and the aforementioned composition. The photoactive substance is activated and the effect of the activating on the optical properties of the combination is detected.

Abstract: A flow back process usable on a well during a drilling operation includes the steps of flowing the commingled well fluids and solids into a surface-mounted flow back system under wellbore pressure. Alternatively, a flow back process includes the steps of connecting a surface-mounted flow back system to the well while the well is in an underbalanced condition. The operation of sequentially drilling through each of a plurality of isolation plugs is then initiated while flowing the well fluids and plug fragments into a surface-mounted flow back system. In yet another aspect, a large particle filter includes a filter section, a monitoring assembly, a bypass system and a purge assembly. The large particle filter can be connected to a Christmas tree and used to remove plug fragments from commingled flow leaving the well during a drilling operation.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: A method and apparatus for controlling a piezo-electric actuator coupled to a driven member is disclosed. The piezo-electric actuator is responsive to waveforms with asymmetrical voltage/current profiles on the rising and falling edge to effect consistent and cumulative movement of the driven member in one of two directions throughout the reciprocations of the piezo-electric actuator. The waveforms are digitally generated from a stored set of numbers or a function for generating the set of numbers. The numbers correspond with the discrete digital values associated with the desired waveforms for moving the driven member in either of at least two directions. The controller may be used to drive more than one piezo-electric actuator. The controller may include responsiveness to a feedback of the position of the driven member to accurately position the driven member.

Abstract: The present invention provides a folding frame and other devices for use in association with cases/luggage for folding clothes (240, 242) into compact packages for storage and/or transport. The frames have transverse bars that define curved transitions for smooth folding therearound, which avoid creasing of the clothing folded onto the frame.

Abstract: The present invention provides an optical signal generator for use in calibrating and testing optical components. The optical signal generator utilizes a tunable laser in conjunction with a novel modulation circuit to output an analog/digital optical signal. The modulator circuit combines a low-frequency, closed loop power control with a separate digital modulator. The output beam of the tunable laser may be modulated over a wide range of frequencies, duty cycles and amplitudes. Circuitry is also provided for modulation of an analog signal onto the output.

Abstract: Novel squaraine dyes and compositions of matter containing such dyes are disclosed. The novel squaraine dyes have an absorption maximum greater than 600 nanometers and are particularly useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.

Abstract: Novel squaraine dyes and compositions of matter containing such dyes are disclosed . The novel squaraine dyes have an absorption maximum greater than 600 nanometers and are particularly useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.

Abstract: Novel squaraine dyes and compositions of matter containing such dyes are disclosed. The novel squaraine dyes have an absorption maximum greater than 600 nanometers and are particularly useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.

Abstract: Squaraine dyes and compositions of matter containing such dyes are disclosed. The squaraine dyes have an absorption maximum greater than 600 nanometers and are particularly useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.

Abstract: Assay methods are provided for determining an analyte in a sample suspected of containing the analyte. The method is carried out using a composition that includes a conjugate of a first sbp member with a particle. A luminescer is reversibly associated with a nonaqueous phase of the particle. Where the first sbp member is not complementary to the analyte, a second sbp member that is capable of binding to the first sbp member is employed. Unbound conjugate is separated from conjugate that is bound to the analyte or to the second sbp member. A reagent for enhancing the detectability of the luminescer is added and the light emission of the luminescer acted on by the reagent is measured.

Abstract: Squaraine dyes and compositions of matter containing such dyes are disclosed. The squaraine dyes have an absorption maximum greater than 600 nanometers and are particulary useful in conjunction with a helium/neon (He/Ne) laser. Some of the squaraine dyes are hydrophilic and are therefore water soluble or water compatible and others of the squaraine dyes are lipophilic.