Abstract: A gas flow system and method are provided for controlling the moisture in a gas flow. The system may include a gas source from which gas flows, a processing chamber to which the gas flows, and a gas flow line through which the gas flows from the gas source to the processing chamber. The gas flow line may include a moisture control line section. The moisture control line section includes a pass-through line through which the gas may pass, so as to be exposed to a dryer. The exposure to a dryer may be controlled by a suitable valve. A scrubber is disposed in the gas flow line, the scrubber removing contaminates from the gas in the gas flow. The system may include a moisture sensor disposed in the gas flow, the moisture sensor sensing at least one parameter of the gas and outputting a signal representing the at least parameter to a moisture sensor controller, such that the moisture sensor controller determines the moisture in the gas.

Abstract: A gas flow system and method are provided for controlling the moisture in a gas flow. The system may include a gas source from which gas flows, a processing chamber to which the gas flows, and a gas flow line through which the gas flows from the gas source to the processing chamber. The gas flow line may include a moisture control line section. The moisture control line section includes a pass-through line through which the gas may pass, so as to be exposed to a dryer. The exposure to a dryer may be controlled by a suitable valve. A scrubber is disposed in the gas flow line, the scrubber removing contaminates from the gas in the gas flow. The system may include a moisture sensor disposed in the gas flow, the moisture sensor sensing at least one parameter of the gas and outputting a signal representing the at least parameter to a moisture sensor controller, such that the moisture sensor controller determines the moisture in the gas.