Patents by Inventor John Preston Benedict

John Preston Benedict has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shallow trench isolation with oxide-nitride/oxynitride liner
    Patent number: 6046487
    Abstract: Disclosed is an improved process and liner for trench isolation which includes either a single oxynitride layer or a dual oxynitride (or oxide)/nitride layer. Such a process and liner has an improved process window as well as being an effective O.sub.2 diffusion barrier and resistant to hot phosphoric and hydrofluoric acids.
    Type: Grant
    Filed: December 12, 1997
    Date of Patent: April 4, 2000
    Assignee: International Business Machines Corporation
    Inventors: John Preston Benedict, David Mark Dobuzinsky, Philip Lee Flaitz, Erwin N. Hammerl, Herbert Ho, James F. Moseman, Herbert Palm, Seiko Yoshida, Hiroshi Takato
  • Shallow trench isolation with oxide-nitride/oxynitride liner
    Patent number: 5763315
    Abstract: Disclosed is an improved process and liner for trench isolation which includes either a single oxynitride layer or a dual oxynitride (or oxide)/nitride layer. Such a process and liner has an improved process window as well as being an effective O.sub.2 diffusion barrier and resistant to hot phosphoric and hydrofluoric acids.
    Type: Grant
    Filed: January 28, 1997
    Date of Patent: June 9, 1998
    Assignees: International Business Machines Corporation, Siemens Aktiengesellschaft, Kabushiki Kaisha Toshiba
    Inventors: John Preston Benedict, David Mark Dobuzinsky, Philip Lee Flaitz, Erwin N. Hammerl, Herbert Ho, James F. Moseman, Herbert Palm, Seiko Yoshida, Hiroshi Takato