Patents by Inventor John Robert Barthel

John Robert Barthel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhanced step coverage of thin films on patterned substrates by oblique angle PVD
    Patent number: 7244670
    Abstract: A method and an apparatus for fabricating an integrated circuit entail directing a vapor flux toward a substrate surface from a plurality of directions associated with a plurality of azimuth angles, and selecting a deposition angle of the vapor flux, relative to a normal incidence, to obtain a substantially conformal film. The surface feature can be associated with, for example, one or more vias and/or one or more trenches.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: July 17, 2007
    Assignee: Rensselaer Polytechnic Institute
    Inventors: Tansel Karabacak, Toh-Ming Lu, John Robert Barthel