Patents by Inventor John S. Hallock

John S. Hallock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6709807
    Abstract: A process for reducing roughness from a surface of a patterned photoresist. The process includes exposing a substrate having the patterned photoresist thereon to a vapor, wherein the vapor penetrates into and/or reacts with the surface of the photoresist. The substrate having the patterned photoresist thereon is then heated to a temperature and for a time sufficient to cause the surface of the photoresist to flow and/or react with the vapor wherein the surface roughness decreases. Optionally, the substrate is exposed to radiation during the process to increase the etch resistance of the photoresist and/or facilitate the reaction of the vapor with the surface of the photoresist.
    Type: Grant
    Filed: October 9, 2002
    Date of Patent: March 23, 2004
    Assignee: Axcelis Technologies, Inc.
    Inventors: John S. Hallock, Robert D. Mohondro
  • Patent number: 6582891
    Abstract: A process for reducing roughness from a surface of a patterned photoresist. The process includes exposing a substrate having the patterned photoresist thereon to a vapor, wherein the vapor penetrates into and/or reacts with the surface of the photoresist. The substrate having the patterned photoresist thereon is then heated to a temperature and for a time sufficient to cause the surface of the photoresist to flow and/or react with the vapor wherein the surface roughness decreases. Optionally, the substrate is exposed to radiation during the process to increase the etch resistance of the photoresist and/or facilitate the reaction of the vapor with the surface of the photoresist.
    Type: Grant
    Filed: November 14, 2000
    Date of Patent: June 24, 2003
    Assignee: Axcelis Technologies, Inc.
    Inventors: John S. Hallock, Robert D. Mohondro
  • Publication number: 20030049571
    Abstract: A process for reducing roughness from a surface of a patterned photoresist. The process includes exposing a substrate having the patterned photoresist thereon to a vapor, wherein the vapor penetrates into and/or reacts with the surface of the photoresist. The substrate having the patterned photoresist thereon is then heated to a temperature and for a time sufficient to cause the surface of the photoresist to flow and/or react with the vapor wherein the surface roughness decreases. Optionally, the substrate is exposed to radiation during the process to increase the etch resistance of the photoresist and/or facilitate the reaction of the vapor with the surface of the photoresist.
    Type: Application
    Filed: October 9, 2002
    Publication date: March 13, 2003
    Applicant: Axcelis Technologies, Inc.
    Inventors: John S. Hallock, Robert D. Mohondro
  • Patent number: 5925719
    Abstract: A substantially ester-free, acid-functional thiol-functional resin is prepared via the reaction of an epoxy compound with a thiolacetic acid in the presence of an amine catalyst and heat to form a thioacetate derivative which is hydrolyzed to yield an ester-free, .beta.-hydroxy thiol-functional resin. The .beta.-hydroxy thiol-functional resin can then be reacted with a material capable of insert a group conferring aqueous-base developability such as a cyclic anhydride.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: July 20, 1999
    Assignee: MacDermid, Incorporated
    Inventors: John S. Hallock, Donald E. Herr
  • Patent number: 5919602
    Abstract: Acid functional primary thiols having no hydroxy substituents in the beta position, and also having aromatic backbones, can be combined with unsaturated resins to make aqueous base-developable, photoimaging compositions such as solder masks and resists.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: July 6, 1999
    Assignee: MacDermid Acumen, Inc.
    Inventors: Donald E. Herr, John S. Hallock
  • Patent number: 5508141
    Abstract: A coating of resin and photoactive functionality is autodeposited from an emulsion onto a metallic substrate in order to selectively protect the substrate from corrosive environments such as etchant processes. An acid and oxidizing agent are included in the emulsion so that when the substrate is immersed in the emulsion the resin and photoactive functionality autodeposits. The resulting coating can be exposed to actinic radiation in an image-wise fashion and developed in an alkaline solution to develop the image created. In instances where the emulsion and process are used to make circuit boards, the metallic surface uncovered during developing is then etched away, leaving only the coated sections of the surface. The resulting coated surfaces will be the circuit traces of the circuit board.
    Type: Grant
    Filed: December 2, 1994
    Date of Patent: April 16, 1996
    Assignee: W. R. Grace & Co.-Conn.
    Inventors: Daniel J. Hart, Alan F. Becknell, Betsy Elzufon, John S. Hallock, Alan R. Browne
  • Patent number: 5496682
    Abstract: Dense sintered parts of ceramic and/or metallic materials are formed using stereo photolithography. An initial flowable mixture of sinterable inorganic particles, photocurable monomer, photoinitiator and dispersant is flowed over a substrate and cured in a selective pattern. Subsequent layers of the mixture are flowed over the substrate and cured to build a three dimensional body. The body is then fired to produce a dense sintered part. Parts having in excess of 95% of theoretical density can be produced.
    Type: Grant
    Filed: October 15, 1993
    Date of Patent: March 5, 1996
    Assignee: W. R. Grace & Co.-Conn.
    Inventors: Tariq Quadir, Srinivas K. Mirle, John S. Hallock