Patents by Inventor John S. Schaper

John S. Schaper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP point of use filtration
    Publication number: 20040014403
    Abstract: A system for detecting the usable state of a point of use filter of a chemical mechanical polishing (CMP) tool. The system measures the pressure differential across the point of use filter. In one example, the system includes an upstream and a down stream pressure transducer for measuring the pressure differential. The system can provide an indication that the usable state of filter has decreased to a point where the filter needs to be replaced. Such an indication may be displayed on a display located on the polishing tool frame.
    Type: Application
    Filed: July 16, 2002
    Publication date: January 22, 2004
    Inventors: Brandon L. Oberkampf, Kimberly A. Kidwell, John S. Schaper, Jeffrey J. Sultemeier, Robert R. Stolle