Abstract: A method is disclosed for the implementation of phase shifting masks for EUV lithography. The method involves directly etching material away from the multilayer coating of the mask, to cause a refractive phase shift in the mask. By etching into the multilayer (for example, by reactive ion etching), rather than depositing extra material on the top of the multilayer, there will be minimal absorption loss associated with the phase shift.

Abstract: Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.

Abstract: A method is described for deforming a non-rigid object in order to correct small errors in the contour of its functional surface(s). This method causes the deformation of the object, and in particular, the object's functional surface, by altering the surface tractions or surface stresses on any surface of the part including a non-functional one.

Abstract: A method is disclosed for the implementation of phase shifting masks for EUV lithography. The method involves directly etching material away from the multilayer coating of the mask, to cause a refractive phase shift in the mask. By etching into the multilayer (for example, by reactive ion etching), rather than depositing extra material on the top of the multilayer, there will be minimal absorption loss associated with the phase shift.

Abstract: A process is provided for producing near-perfect optical surfaces, for EUV and soft-x-ray optics. The method involves polishing or otherwise figuring the multilayer coating that has been deposited on an optical substrate, in order to correct for errors in the figure of the substrate and coating. A method such as ion-beam milling is used to remove material from the multilayer coating by an amount that varies in a specified way across the substrate. The phase of the EUV light that is reflected from the multilayer will be affected by the amount of multilayer material removed, but this effect will be reduced by a factor of 1−n as compared with height variations of the substrate, where n is the average refractive index of the multilayer.

Abstract: Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 Å and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.

Abstract: Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.

Abstract: Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 Å and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.

Abstract: A method and apparatus is disclosed for transporting a large number of live poultry from one location to another. Using a tray, the birds are loaded and transported to the new location where the tray is lifted upward and/or laterally into a position for unloading which is convenient relative to the features present at the new location. When the apparatus reaches the new location, a gate on the leading edge of the tray is opened and the birds are forcibly moved across the floor of the tray through the open gate and into the desired location. Movement of the birds is caused in one disclosed embodiment by equipping the tray with a slippery floor and tilting the tray toward the open gate. In one alternative disclosed embodiment, movement of the birds is caused by equipping the floor of the tray with a conveyor belt and a rake to gently push the birds toward the open gate.

Abstract: A method and apparatus is disclosed for transporting a large number of live poultry from one location to another. Using a tray, the birds are loaded and transported to the new location where the tray is lifted upward and/or laterally into a position for unloading which is convenient relative to the features present at the new location. When the apparatus reaches the new location, a gate on the leading edge of the tray is opened and the birds are forcibly moved across the floor of the tray through the open gate and into the desired location. Movement of the birds is caused in one disclosed embodiment by equipping the tray with a slippery floor and tilting the tray toward the open gate. In one alternative disclosed embodiment, movement of the birds is caused by equipping the floor of the tray with a conveyor belt and a rake to gently push the birds toward the open gate.

Abstract: A process for creating a mask substrate involving depositing: 1) a coating on one or both sides of a low thermal expansion material EUVL mask substrate to improve defect inspection, surface finishing, and defect levels; and 2) a high dielectric coating, on the backside to facilitate electrostatic chucking and to correct for any bowing caused by the stress imbalance imparted by either other deposited coatings or the multilayer coating of the mask substrate. An film, such as TaSi, may be deposited on the front side and/or back of the low thermal expansion material before the material coating to balance the stress. The low thermal expansion material with a silicon overlayer and a silicon and/or other conductive underlayer enables improved defect inspection and stress balancing.

Abstract: A non-contact polishing tool that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required.

Abstract: An automatic microscope focusing system including a light source 44, a dual channel fiber optics bundle 56 and 58, chopper means 54 for alternately admitting light to the channels, a reticle 66 and associated optics to cast alternating images onto the surface of an inspected article W, return masks 82 and 88, and associated detectors 86 and 92 for inspecting the alternating reticle images, and control circuitry 36 and 38 responsive to the detector outputs and operative to drive the system microscope 10 into focus. The preferred embodiment also includes a flipping pupil 60 for accommodating particular microscope objectives.

Abstract: An improved plasticized regenerated cellulose film, and particularly a plasticized regenerated cellulose film having a moistureproofing, solvent-sealable coating in which plasticizer migration into the coating is at least minimized, and a process for making such film.

Abstract: Leaf tobacco or the like in a substantially airtight enclosure is cured and dried by circulating through the enclosure air that is controllably heated by a forced air fuel burner located in an elongated vertically oriented duct outside the enclosure. The outlet end of the duct is communicated with the enclosure at the bottom thereof, and its upper inlet end is controllably communicable with the enclosure at the top thereof and with the ambient atmosphere. The air intake port of the fuel burner receives only air flowing through the duct. Air circulation is effected by an electric motor driven fan near the inlet of the duct, and a restriction in the duct produces a pressure drop across the burner that prevents back-drafts through it.

Abstract: A method of preparing a composite film having improved adhesion between the coating layer and the base layer wherein a viscose solution and a hydroxyalkyl cellulose solution are coextruded in the form of a composite sheet, coagulated and then coated with a lacquer composition over the hydroxyalkyl cellulose layer.