Patents by Inventor John Stanley MANGUM

John Stanley MANGUM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patterned nanochannel sacrificial layer for semiconductor substrate reuse
    Patent number: 11830733
    Abstract: Described herein are systems and methods of utilizing nanochannels generated in the sacrificial layer of a semiconductor substrate to increase epitaxial lift-off speeds and facilitate reusability of GaAs substrates. The provided systems and methods may utilize unique nanochannel geometries to increase the surface area exposed to the etchant and further decrease etch times.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: November 28, 2023
    Assignee: Alliance for Sustainable Energy, LLC
    Inventors: John Stanley Mangum, William Edwin Mcmahon, Emily Lowell Warren, San Theingi
  • PATTERNED NANOCHANNEL SACRIFICIAL LAYER FOR SEMICONDUCTOR SUBSTRATE REUSE
    Publication number: 20220310389
    Abstract: Described herein are systems and methods of utilizing nanochannels generated in the sacrificial layer of a semiconductor substrate to increase epitaxial lift-off speeds and facilitate reusability of GaAs substrates. The provided systems and methods may utilize unique nanochannel geometries to increase the surface area exposed to the etchant and further decrease etch times.
    Type: Application
    Filed: March 28, 2022
    Publication date: September 29, 2022
    Inventors: John Stanley MANGUM, William Edwin MCMAHON, Emily Lowell WARREN, San THEINGI