Abstract: An example proof mass assembly includes a proof mass; a proof mass support; a flexure connecting the proof mass to the proof mass support, wherein the proof mass is configured to rotate relative to the proof mass support via the flexure; a first resonator connected to a first major surface of the proof mass and a first major surface of the proof mass support; and a second resonator connected to a second major surface of the proof mass and a second major surface of the proof mass support, wherein at least one of the proof mass, the proof mass support, the flexure, the first resonator, or the second resonator is formed by selective laser etching.

Abstract: A resonator defining a longitudinal axis that includes a mounting pad, a pad connector, at least one isolation mechanism, and a pair of elongated tines extending in the direction of the longitudinal axis. The isolation mechanism including an outer block defining a first outer end and a second outer end on opposite sides, an inner block defining a first inner end and a second inner end on opposite sides, and a pair of interconnect members, where each respective interconnect member of the pair of interconnect members connects the second outer end to the first inner end. The respective first ends of the pair of elongated tines being connected to the second inner end and the pad connector connects the mounting pad to the first outer end.

Abstract: A magnetic circuit assembly for an accelerometer includes an excitation ring that includes a base portion defining oppositely facing first and second sides, a ring portion extending from the second side of the base portion to define a ring recess, a first metallic inlay recessed into the first side of the base portion in which the first metallic inlay includes a material different than that of the base portion, a second metallic inlay recessed into the second side of the base portion in which the second metallic inlay includes a material different than that of the base portion, and a magnet received within the ring recess and attached to the second metallic inlay.

Abstract: A proof mass assembly comprising a first and a second resonator, each resonator comprising a first and a second bond pad, and a pair of elongated tines, wherein the first and the second bond pads are positioned at opposite ends of the elongated tines; a proof mass comprising a first and a second major surface, the first major surface of the proof mass comprising a bond region including at least one channel extending in a direction substantially parallel to a longitudinal axis of the elongated tines of the first resonator; a proof support comprising a first and a second major surface; at least one flexure connecting the proof mass to the proof support; and an adhesive bonding the first bond pad of the first resonator to the bond region and bonding the second bond pad of the first resonator to the first major surface of the proof support.

Abstract: A magnetic circuit assembly for an accelerometer includes an excitation ring that includes a base portion defining oppositely facing first and second sides, a ring portion extending from the second side of the base portion to define a ring recess, a first metallic inlay recessed into the first side of the base portion in which the first metallic inlay includes a material different than that of the base portion, a second metallic inlay recessed into the second side of the base portion in which the second metallic inlay includes a material different than that of the base portion, and a magnet received within the ring recess and attached to the second metallic inlay.

Abstract: A resonator defining a longitudinal axis that includes a mounting pad, a pad connector, at least one isolation mechanism, and a pair of elongated tines extending in the direction of the longitudinal axis. The isolation mechanism including an outer block defining a first outer end and a second outer end on opposite sides, an inner block defining a first inner end and a second inner end on opposite sides, and a pair of interconnect members, where each respective interconnect member of the pair of interconnect members connects the second outer end to the first inner end. The respective first ends of the pair of elongated tines being connected to the second inner end and the pad connector connects the mounting pad to the first outer end.

Abstract: A proof mass assembly comprising a first and a second resonator, each resonator comprising a first and a second bond pad, and a pair of elongated tines, wherein the first and the second bond pads are positioned at opposite ends of the elongated tines; a proof mass comprising a first and a second major surface, the first major surface of the proof mass comprising a bond region including at least one channel extending in a direction substantially parallel to a longitudinal axis of the elongated tines of the first resonator; a proof support comprising a first and a second major surface; at least one flexure connecting the proof mass to the proof support; and an adhesive bonding the first bond pad of the first resonator to the bond region and bonding the second bond pad of the first resonator to the first major surface of the proof support.

Abstract: A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.

Abstract: An in-plane, closed-loop Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane of the device. The device includes substrates, a proof mass, spring elements that flexibly connect the proof mass to the substrate and constrain the proof mass to translate within the major plane of the device which corresponds to a major surface of the proof mass, a plurality of conductive traces located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive traces, and a plurality of anchor pads connected to the substrate and one of the conductive springs.

Abstract: An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass, a hinge element that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots.

Abstract: A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.

Abstract: An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass, a hinge element that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots.

Abstract: An in-plane, closed-loop Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane of the device. The device includes substrates, a proof mass, spring elements that flexibly connect the proof mass to the substrate and constrain the proof mass to translate within the major plane of the device which corresponds to a major surface of the proof mass, a plurality of conductive traces located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive traces, and a plurality of anchor pads connected to the substrate and one of the conductive springs.