Abstract: A fluid delivery system is provided having a degas module which can be retrofitted to allow early detection of degas defects within the system. A degas chamber is modifiable to include at least one view port into which an operator can visually examine leaks within a fluid-carrying tube existing exclusively within the degas chamber. Liquid leaking from the tube, or particles possibly entering the tube, can be readily detected through the view port prior to harming any downstream processing operations. In addition to the view port, a purge port can be provided through which a purge gas is transmitted during times when potential backstreaming can occur. The purge gas alleviates unwanted gases from interacting with the volatile leaking liquid. This helps minimize particulate formation in or around the leak and, specifically, particulates entrained within the liquid forwarded to the downstream processing tool.