Patents by Inventor John Thornell

John Thornell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection of substrates
    Patent number: 10553504
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: February 4, 2020
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Semiconductor device inspection of metallic discontinuities
    Patent number: 10466179
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: November 5, 2019
    Assignee: Rudoplh Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES
    Publication number: 20180275063
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • INSPECTION OF SUBSTRATES
    Publication number: 20180277452
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • System and method of characterizing micro-fabrication processes
    Patent number: 10024804
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: July 17, 2018
    Assignee: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20170254757
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: May 22, 2017
    Publication date: September 7, 2017
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • System and method of characterizing micro-fabrication processes
    Patent number: 9658169
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: May 23, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20150316487
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: March 14, 2014
    Publication date: November 5, 2015
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20140320635
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: March 14, 2014
    Publication date: October 30, 2014
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden