Abstract: An apparatus for positioning a work piece along a Z-axis includes a base having a depression with an open top in it forming a chamber. A cover member has a rigid central portion and a rigid outer portion coupled with the central portion by an intermediate flexure. The cover member overlies and is secured to the base member at the outer portion of the cover member to close the chamber. Fluid under pressure applied to the chamber is used to move the central portion of the cover member along the Z-axis proportionally to the pressure of fluid applied to the chamber by flexing of the flexure.

Abstract: A method and software is disclosed for evaluating characteristics, such as flatness, of a surface of a sample having an edge, comprising selecting an evaluation area having an area surface and a boundary, at least one portion of which is definable with reference to the edge, and evaluating characteristics of the area surface. Edge-specific evaluation conditions are used with edge-specific metrics to quantify parameters for said evaluation area. A system for evaluating such characteristics comprises a data collection system for generating data values for selected locations on said surface; and a data analyzing system for analyzing data values to determine such characteristics. A data interpolation system may be provided to interpolate data values collected with reference to a first coordinate system for analyzing with reference to a second coordinate system.

Abstract: A diverter valve comprising an upper housing section which defines a fluid inlet and a first fluid outlet. Rotatably connected to the upper housing section is a lower housing section which defines a second fluid outlet. The lower housing section is selectively rotatable between first and second positions. Disposed within the upper housing section is a diverter element which defines first and second flow conduits. The diverter element is attached to the lower housing section and rotatable concurrently therewith. The first flow conduit fluidly communicates with the fluid inlet and the second fluid outlet when the lower housing section is in the first position, with the second flow conduit fluidly communicating with the fluid inlet and the first fluid outlet when the lower housing section is in the second position.