Abstract: A method for manufacturing a mirror device is presented. The method includes forming a mirror from a first substrate and forming a hinge/support structure from a second substrate. The hinge/support structure is formed with a recessed region and a torsional hinge region. The mirror is attached to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A shock resistant and mode mixing resistant assembly for oscillating a device such as a MEMS mirror around a pivot axis by means of two pairs of piezoelectric elements or towers is provided. The resistance to mechanical shock and mode mixing is accomplished by mounting the broad faces or width of each piezoelectric element in a chevron shape so that the broad faces or width dimensions are not in parallel or aligned with each other. Mounting the piezoelectric elements so that the broad faces or width dimensions are at a 15 degree angle with respect to a line perpendicular to the pivot axis has been found to be especially effective.

Abstract: A device such as a mirror assembly comprises a movable structure (41) having a first movable portion (45) hinged to a frame portion (43) by a first pair of torsional hinges (47A and 47B) spaced apart along a first axis (49). The device may also have a second movable portion (51) and a second pivot axis provided by set of torsional hinge (53A and 53B). The movable structure or mirror assembly (41) having a first coefficient of expansion is attached to a support structure (42) having a different coefficient of expansion at a single attaching or anchor point (63) such as by epoxy or a clamp (101). The single attaching point (63) allows expansion and/or contraction along two dimensions and thereby prevents compression and/or tension forces resulting from different coefficients of expansion between the mirror assembly 41 and the support structure 42 from being applied to the torsional hinges 47A, 47B, 53A and 53B.

Abstract: A shock resistant and mode mixing resistant assembly for oscillating a device such as a MEMS mirror around a pivot axis by means of two pairs of piezoelectric elements or towers is provided. The resistance to mechanical shock and mode mixing is accomplished by mounting the broad faces or width of each piezoelectric element in a chevron shape so that the broad faces or width dimensions are not in parallel or aligned with each other. Mounting the piezoelectric elements so that the broad faces or width dimensions are at a 15 degree angle with respect to a line perpendicular to the pivot axis has been found to be especially effective.

Abstract: A multilevel mirror plate suitable for use with a torsional hinged mirror assembly is laser milled to provide a more effective truss structure in less time and at a reduced cost.

Abstract: A torsional hinged device having an optical surface, such as a mirror or refractive surface, formed from a single piece of silicon with reduced flexing. In addition to central spines to prevent or reduce flexing of the tips of the optical surface, the device may also include perimeter ridges to further reduce or prevent flexing as well as reduce warping of the edges of the optical surface. To allow balancing of the device so that the center of mass of the assembly is on the pivoting axis, a recess is formed in the back portion to receive a permanent drive/sense magnet.

Abstract: A pivoting device such as a MEMS mirror provides improved coupling between a permanent magnet on the device and an adjacent electrical coil that may provide a drive force or position sensing. The improved coupling is obtained by forming a cavity in the coil structure. The cavity receives the permanent magnet such that the spacing between the magnet and the electrical windings or coil is at a minimum.

Abstract: A torsional hinge structure for supporting a functional surface such as a mirror is disclosed. The structure includes at least one torsional hinge extending between a functional surface such as for example, a mirror and an anchor pad such that the torsional or the functional surface can pivot around the torsional hinge. The device may comprise two torsional hinges or a single torsional hinge. However, the single torsional hinge or one of the dual torsional hinges will be elongated and include a permanent magnet mounting area to which is bonded a permanent magnet. The structure defines a bobbin area or portion underneath the enlarged area for mounting the drive magnet. A conductor is wound around the drive bobbin for forming an electromagnet, which generates magnetic forces that interact with the permanent magnet mounted on the torsional hinge to cause pivoting motion of the mirror or other functional device.

Abstract: A low inertia two axis torsional hinged device formed from a single piece of silicon. The two axis torsional hinged device uses a pair of diametrally charged permanent drive magnets to pivot a gimbals member of the assembly about first and second torsional hinges aligned along a first axis. A single drive magnet mounted at the center of the backside of an optical surface of the assembly pivots the optical surface about another pair of torsional hinges aligned along a second axis that is orthogonal to the first axis. The drive magnets mounted on the gimbals member are located on the first axis and the single drive magnet on the back side of the optical surface is mounted at the intersection of the first and second axis such that all three magnets are aligned along the first axis.

Abstract: A multilayered torsional hinged mirror assembly that includes a drive/sensing permanent magnet. To allow for permanent magnets having increased thicknesses, a hinge plate of the mirror defines a recess for receiving the permanent magnet. The recess may be etched completely through the hinge plate such that the permanent magnet is bonded to the back side of the mirror layer, or alternately may extend part way through the hinge plate to allow the permanent magnet to be mounted to the bottom of the recess. In both embodiments, the center of mass of the mirror assembly can be adjusted to lie on the pivoting axis of the mirror assembly by selection of the depth of the recess and the shape and mass of the permanent magnet.

Abstract: A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Abstract: Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

Abstract: An oscillating torsional hinged device, such as a mirror, having the advantages of an oscillating device with permanent magnets mounted on the hinges, but without excessive size is disclosed. The permanent magnets are mounted in the areas of the anchor members rather than directly on the hinges.

Abstract: The present invention provides a single torsional hinge device, such as a mirror, adapted for use as a pivoting mirror and preferably a pivoting mirror oscillating at a resonant frequency about the single hinge. The single torsional hinge mirror reduces or substantially eliminates stresses on the torsional hinge mirrors caused by mismatched mounting levels of the support structure and/or differences of the coefficient and thermal expansion of materials in the mirror and support structures. The mirror may include a single layer of silicon having a reflective surface or may be a multilayered mirror wherein silicon is used for the torsional hinges and support and silicon or other materials may be used as the reflecting surface.

Abstract: A torsional hinged mirror design with reduced flexing. In addition to a central spine to prevent or reduce flexing of the tips, the mirror layer also includes perimeter ridges to reduce or prevent flexing or warping of the mirror edges. To provide an even stiffer mirror with minimum weight, either or both of the hinge plate and balancing plate may also include perimeter ridges that align with the perimeter ridges of the mirror layer.

Abstract: A magnetic drive for providing pivotal motion to a functional surface, such as a mirror. The magnetic drive may be used to drive any torsional hinged device, but is particularly suitable for driving a torsional hinged mirror. According to a first embodiment, a dual axis functional surface uses a first pair of torsional hinges to provide primary movement to the functional surface and a second pair of torsional hinges provides movement orthogonal to the primary movement to allow positioning in two directions. The mass and movement of inertia of the functional surface is reduced by relocating permanent magnet sets to the axis of rotation. The reduced mass and movement of inertia results in a stiff robust hinge having a resonant frequency above about 120 Hz.

Abstract: The present invention provides methods and apparatus for combining a pivoting mirror and support bracket such that the support bracket transmits little or no stresses to the torsional hinges of the mirror. The bracket includes an isolation slot extending from one edge toward a second edge and then preferably around the mounting areas of the hinge such that stresses applied to the mounting bracket will not be transmitted to each side of the mirror and thereby stress the mirror.