Patents by Inventor JOHN W. RASNICK

JOHN W. RASNICK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Direct drive arrangement to control confinement rings positioning and methods thereof
    Patent number: 8992722
    Abstract: A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing is provided. The confinement region is a chamber volume surrounded by confinement rings is provided. The arrangement includes plunger assemblies configured for changing the pressure of motor assemblies configured for vertically moving the plunger assemblies, and recording set point position values for the plunger assemblies. The arrangement further includes a set of circuits configured for driving the motor assemblies to move the plunger assemblies to change the pressure volume within the confinement region. The set of circuits is also configured for providing power to the motor assemblies. The set of circuits is further configured for receiving the set point position values from the motor assemblies.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: March 31, 2015
    Assignee: Lam Research Corporation
    Inventors: John W. Rasnick, Fred D. Egley
  • DIRECT DRIVE ARRANGEMENT TO CONTROL CONFINEMENT RINGS POSITIONING AND METHODS THEREOF
    Publication number: 20110054661
    Abstract: A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing is provided. The confinement region is a chamber volume surrounded by confinement rings is provided. The arrangement includes plunger assemblies configured for changing the pressure of motor assemblies configured for vertically moving the plunger assemblies, and recording set point position values for the plunger assemblies. The arrangement further includes a set of circuits configured for driving the motor assemblies to move the plunger assemblies to change the pressure volume within the confinement region. The set of circuits is also configured for providing power to the motor assemblies. The set of circuits is further configured for receiving the set point position values from the motor assemblies.
    Type: Application
    Filed: September 1, 2009
    Publication date: March 3, 2011
    Inventors: JOHN W. RASNICK, FRED D. EGLEY