Patents by Inventor John W. Zinn

John W. Zinn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Doped substrate regions in MEMS microphones
    Patent number: 9888325
    Abstract: Systems and methods for preventing electrical leakage in a MEMS microphone. In one embodiment, the MEMS microphone includes a semiconductor substrate, an electrode, a first insulation layer, and a doped region. The first insulation layer is formed between the electrode and the semiconductor substrate. The doped region is implanted in at least a portion of the semiconductor substrate where the semiconductor substrate is in contact with the first insulation layer. The doped region is also electrically coupled to the electrode.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: February 6, 2018
    Assignee: Robert Bosch GmbH
    Inventors: Brett Mathew Diamond, John M. Muza, John W. Zinn
  • Mesh in mesh backplate for micromechanical microphone
    Patent number: 9820059
    Abstract: A MEMS backplate. The MEMS backplate includes a first mesh pattern having a first height and a first arrangement of openings, and a second mesh pattern having a second height and a second arrangement of vent hole apertures. The second mesh pattern is contained within the opening formed by the first mesh pattern.
    Type: Grant
    Filed: May 29, 2014
    Date of Patent: November 14, 2017
    Assignee: Robert Bosch GmbH
    Inventors: John W. Zinn, Brett Matthew Diamond
  • MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICAL MICROPHONE
    Publication number: 20170245060
    Abstract: Backplates for MEMS devices. In one embodiment, the backplate includes an interconnect layer, a first layer, a second layer and a plurality of openings. The interconnect layer includes a first side and a second side that is opposite from the first side. The first layer is coupled to the first side of the interconnect layer. The second layer is coupled to the second side of the interconnect layer. The plurality of openings are located between a first side of the backplate and a second side of the backplate.
    Type: Application
    Filed: May 8, 2017
    Publication date: August 24, 2017
    Inventors: John W. Zinn, Brett Matthew Diamond
  • TRAPPED MEMBRANE
    Publication number: 20170183218
    Abstract: A MEMS trapped membrane. The MEMS trapped membrane includes a first layer and a second structure. The first layer has an outer section and an inner membrane. The outer section and inner membrane are detached from each other by a separation, and have inner membrane protrusions and outer section protrusions formed by the separation. The second structure is coupled to the outer section and has second protrusions that overlay corresponding inner membrane protrusions.
    Type: Application
    Filed: March 10, 2017
    Publication date: June 29, 2017
    Inventor: John W. Zinn
  • DOPED SUBSTRATE REGIONS IN MEMS MICROPHONES
    Publication number: 20170180869
    Abstract: Systems and methods for preventing electrical leakage in a MEMS microphone. In one embodiment, the MEMS microphone includes a semiconductor substrate, an electrode, a first insulation layer, and a doped region. The first insulation layer is formed between the electrode and the semiconductor substrate. The doped region is implanted in at least a portion of the semiconductor substrate where the semiconductor substrate is in contact with the first insulation layer.
    Type: Application
    Filed: March 31, 2015
    Publication date: June 22, 2017
    Inventors: Brett Mathew Diamond, John M. Muza, John W. Zinn
  • Multi-layer composite backplate for micromechanical microphone
    Patent number: 9648425
    Abstract: A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: May 9, 2017
    Assignee: Robert Bosch GmbH
    Inventors: John W. Zinn, Brett Matthew Diamond
  • Trapped membrane
    Patent number: 9624091
    Abstract: A MEMS trapped membrane. The MEMS trapped membrane includes a first layer and a second structure. The first layer has an outer section and an inner membrane. The outer section and inner membrane are detached from each other by a separation, and have inner membrane protrusions and outer section protrusions formed by the separation. The second structure is coupled to the outer section and has second protrusions that overlay corresponding inner membrane protrusions.
    Type: Grant
    Filed: June 2, 2014
    Date of Patent: April 18, 2017
    Assignee: Robert Bosch GmbH
    Inventor: John W. Zinn
  • MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICALA MICROPHONE
    Publication number: 20160127837
    Abstract: A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer.
    Type: Application
    Filed: May 28, 2014
    Publication date: May 5, 2016
    Inventors: John W. Zinn, Brett Matthew Diamond
  • TRAPPED MEMBRANE
    Publication number: 20160122177
    Abstract: A MEMS trapped membrane. The MEMS trapped membrane includes a first layer and a second structure. The first layer has an outer section and an inner membrane. The outer section and inner membrane are detached from each other by a separation, and have inner membrane protrusions and outer section protrusions formed by the separation. The second structure is coupled to the outer section and has second protrusions that overlay corresponding inner membrane protrusions.
    Type: Application
    Filed: June 2, 2014
    Publication date: May 5, 2016
    Inventor: John W. Zinn
  • MESH IN MESH BACKPLATE FOR MICROMECHANICAL MICROPHONE
    Publication number: 20160112809
    Abstract: A MEMS backplate. The MEMS backplate includes a first mesh pattern having a first height and a first arrangement of openings, and a second mesh pattern having a second height and a second arrangement of vent hole apertures. The second mesh pattern is contained within the opening formed by the first mesh pattern.
    Type: Application
    Filed: May 29, 2014
    Publication date: April 21, 2016
    Inventors: John W. Zinn, Brett Matthew Diamond
  • MEMS microphone with membrane antennas
    Patent number: 9212046
    Abstract: A MEMS microphone. The microphone includes a backplate, a membrane, and a plurality of antennas. The backplate has a plurality of acoustic apertures. The membrane is parallel to the backplate and is positioned a distance from the backplate. The plurality of antennas are connected to the membrane and extend toward the backplate. In addition, the plurality of antennas are positioned entirely within spaces defined by the plurality of acoustic apertures.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: December 15, 2015
    Assignee: Robert Bosch GmbH
    Inventor: John W. Zinn
  • MEMS MICROPHONE WITH MEMBRANE ANTENNAS
    Publication number: 20150102435
    Abstract: A MEMS microphone. The microphone includes a backplate, a membrane, and a plurality of antennas. The backplate has a plurality of acoustic apertures. The membrane is parallel to the backplate and is positioned a distance from the backplate. The plurality of antennas are connected to the membrane and extend toward the backplate. In addition, the plurality of antennas are positioned entirely within spaces defined by the plurality of acoustic apertures.
    Type: Application
    Filed: October 14, 2014
    Publication date: April 16, 2015
    Inventor: John W. Zinn