Abstract: Preferred embodiments of the invention implement techniques for modifying the command trajectory, the architecture of a servomechanism control system, or both, to reduce the servo error during and/or after the command trajectory. An iterative refinement procedure generates for use by the servomechanism control system a corrective input, du, which significantly reduces the error between the desired and actual servomechanism control system outputs. In one embodiment, a uniquely identified plant model is employed in the iterative refinement procedure to compute an approximate gradient that improves the performance and reliability of the refinement procedure. In another embodiment, the actual plant response is used in place of the identified model in the iterative refinement procedure. This is accomplished by time-reversing the stored error signal from a training run, before applying it to the plant to generate an update to the corrective input signal du.

Abstract: An adaptive scanning optical microscope has a scanner lens assembly for acquiring images from different parts of an object plane and for forming a preferably curved image field having at least some aberration which varies as a function of the part of the object plane from which the image is acquired. A steering mirror selects the field of view and steers light from the object and along a light path from the object plane to a final image plane. An adaptive optics element receives the steered light from the object and compensates for the field position dependent optical aberrations and additional optics are along at least part of the light path for conditioning and focusing the light as it moves from the steering mirror, past the adaptive optics element and to the final image plane.

Abstract: Preferred embodiments of the invention implement techniques for modifying the command trajectory, the architecture of a servomechanism control system, or both, to reduce the servo error during and/or after the command trajectory. An iterative refinement procedure generates for use by the servomechanism control system a corrective input, du, which significantly reduces the error between the desired and actual servomechanism control system outputs. In one embodiment, a uniquely identified plant model is employed in the iterative refinement procedure to compute an approximate gradient that improves the performance and reliability of the refinement procedure. In another embodiment, the actual plant response is used in place of the identified model in the iterative refinement procedure. This is accomplished by time-reversing the stored error signal from a training run, before applying it to the plant to generate an update to the corrective input signal du.