Patents by Inventor John Zahurak

John Zahurak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9312266
    Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.
    Type: Grant
    Filed: May 21, 2014
    Date of Patent: April 12, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John Zahurak, Siddartha Kondoju, Haitao Liu, Nishant Sinha
  • Patent number: 9117928
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: August 25, 2015
    Assignee: Micron Technology, Inc.
    Inventors: John Zahurak, Sanh Dang Tang, Gurtej S. Sandhu
  • Publication number: 20140256098
    Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.
    Type: Application
    Filed: May 21, 2014
    Publication date: September 11, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Sanh D. Tang, John Zahurak, Siddartha Kondoju, Haitao Liu, Nishant Sinha
  • Publication number: 20140170822
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Application
    Filed: February 24, 2014
    Publication date: June 19, 2014
    Applicant: Micron Technology, Inc.
    Inventors: John Zahurak, Sanh Dang Tang, Gurtej S. Sandhu
  • Patent number: 8735902
    Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.
    Type: Grant
    Filed: May 10, 2010
    Date of Patent: May 27, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, John Zahurak, Siddartha Kondoju, Haitao Liu, Nishant Sinha
  • Patent number: 8659075
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Grant
    Filed: January 28, 2013
    Date of Patent: February 25, 2014
    Assignee: Micron Technology, Inc.
    Inventors: John Zahurak, Sanh D. Tang, Gurtej S. Sandhu
  • Patent number: 8624300
    Abstract: Briefly, in accordance with one or more embodiments, multilayer memory device, comprising a lower deck and an upper deck disposed on the lower deck, the decks comprising one or more memory cells coupled via one or more contacts. An isolation layer is disposed between the upper deck, and one or more contacts are formed between the upper deck and the lower deck to couple one or more of the contact lines of the upper deck with one or more contact lines of the lower deck.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: January 7, 2014
    Assignee: Intel Corporation
    Inventors: Sanh D. Tang, John Zahurak, Shane Trapp, Krishna K. Parat
  • Patent number: 8508997
    Abstract: Embodiments of the invention pertain to vertical memory structures. Embodiments of the invention describe memory nodes comprising two memory cells on opposing sides of a vertical channel separating a source region and a drain region. Embodiments of the invention may utilize floating gate NAND memory cells, polysilicon diodes, MiM diodes, or MiiM diodes. Embodiments of the invention may be used to form flash memory, RRAM, Memristor RAM, Oxide Ram or OTPROM.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: August 13, 2013
    Assignee: Intel Corporation
    Inventors: Sanh D. Tang, Nishant Sinha, John Zahurak
  • Patent number: 8362546
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: January 29, 2013
    Assignee: Micron Technology, Inc.
    Inventors: John Zahurak, Sanh D. Tang, Gurtej S. Sandhu
  • Publication number: 20120193703
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Application
    Filed: April 2, 2012
    Publication date: August 2, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: John Zahurak, Sanh D. Tang, Gurtej S. Sandhu
  • Publication number: 20120153357
    Abstract: Briefly, in accordance with one or more embodiments, multilayer memory device, comprising a lower deck and an upper deck disposed on the lower deck, the decks comprising one or more memory cells coupled via one or more contacts. An isolation layer is disposed between the upper deck, and one or more contacts are formed between the upper deck and the lower deck to couple one or more of the contact lines of the upper deck with one or more contact lines of the lower deck.
    Type: Application
    Filed: December 16, 2010
    Publication date: June 21, 2012
    Inventors: Sanh D. Tang, John Zahurak, Shane Trapp, Krishna K. Parat
  • Patent number: 8148222
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Grant
    Filed: December 10, 2009
    Date of Patent: April 3, 2012
    Assignee: Micron Technology, Inc.
    Inventors: John Zahurak, Sanh D. Tang, Gurtej S. Sandhu
  • Publication number: 20110272754
    Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.
    Type: Application
    Filed: May 10, 2010
    Publication date: November 10, 2011
    Inventors: Sanh D. Tang, John Zahurak, Siddartha Kondoju, Haitao Liu, Nishant Sinha
  • Publication number: 20110149656
    Abstract: Embodiments of the invention pertain to vertical memory structures. Embodiments of the invention describe memory nodes comprising two memory cells on opposing sides of a vertical channel separating a source region and a drain region. Embodiments of the invention may utilize floating gate NAND memory cells, polysilicon diodes, MiM diodes, or MiiM diodes. Embodiments of the invention may be used to form flash memory, RRAM, Memristor RAM, Oxide Ram or OTPROM.
    Type: Application
    Filed: December 23, 2009
    Publication date: June 23, 2011
    Inventors: Sanh D. Tang, Nishant Sinha, John Zahurak
  • Publication number: 20110140195
    Abstract: Methods of forming an array of memory cells and memory cells that have pillars. Individual pillars can have a semiconductor post formed of a bulk semiconductor material and a sacrificial cap on the semiconductor post. Source regions can be between columns of the pillars, and gate lines extend along a column of pillars and are spaced apart from corresponding source regions. Each gate line surrounds a portion of the semiconductor posts along a column of pillars. The sacrificial cap structure can be selectively removed to thereby form self-aligned openings that expose a top portion of corresponding semiconductor posts. Individual drain contacts formed in the self-aligned openings are electrically connected to corresponding semiconductor posts.
    Type: Application
    Filed: December 10, 2009
    Publication date: June 16, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: John Zahurak, Sanh D. Tang, Gurtej S. Sandhu
  • Publication number: 20070298570
    Abstract: The invention includes methods of forming integrated circuitry, methods of forming memory circuitry, and methods of forming field effect transistors. In one implementation, conductive metal silicide is formed on some areas of a substrate and not on others. In one implementation, conductive metal silicide is formed on a transistor source/drain region and which is spaced from an anisotropically etched sidewall spacer proximate a gate of the transistor.
    Type: Application
    Filed: September 4, 2007
    Publication date: December 27, 2007
    Inventors: Kunal Parekh, John Zahurak
  • Publication number: 20070141821
    Abstract: The invention includes methods of forming integrated circuitry, methods of forming memory circuitry, and methods of forming field effect transistors. In one implementation, conductive metal silicide is formed on some areas of a substrate and not on others. In one implementation, conductive metal silicide is formed on a transistor source/drain region and which is spaced from an anisotropically etched sidewall spacer proximate a gate of the transistor.
    Type: Application
    Filed: February 9, 2007
    Publication date: June 21, 2007
    Inventors: Kunal Parekh, John Zahurak
  • Publication number: 20070045742
    Abstract: A fully-depleted (FD) Silicon-on-Insulator (SOI) MOSFET access transistor comprising a gate electrode of a conductivity type which is opposite the conductivity type of the source/drain regions and a method of fabrication are disclosed.
    Type: Application
    Filed: October 27, 2006
    Publication date: March 1, 2007
    Inventors: Hongmei Wang, John Zahurak
  • Publication number: 20070049037
    Abstract: This invention includes methods of forming openings into dielectric material. In one implementation, an opening is partially etched through dielectric material, with such opening comprising a lowest point and opposing sidewalls of the dielectric material. At least respective portions of the opposing sidewalls within the opening are lined with an electrically conductive material. With such electrically conductive material over said respective portions within the opening, plasma etching is conducted into and through the lowest point of the dielectric material of the opening to extend the opening deeper within the dielectric material. Other aspects and implementations are contemplated.
    Type: Application
    Filed: September 1, 2005
    Publication date: March 1, 2007
    Inventors: Thomas Graettinger, John Zahurak, Shane Trapp, Thomas Figura
  • Publication number: 20070049010
    Abstract: Sacrificial plugs for forming contacts in integrated circuits, as well as methods of forming connections in integrated circuit arrays are disclosed. Various pattern transfer and etching steps can be used to create densely-packed features and the connections between features. A sacrificial material can be patterned in a continuous zig-zag line pattern that crosses word lines. Planarization can create parallelogram-shaped blocks of material that can overlie active areas to form sacrificial plugs, which can be replaced with conductive material to form contacts.
    Type: Application
    Filed: September 1, 2005
    Publication date: March 1, 2007
    Inventors: Byron Burgess, John Zahurak