Patents by Inventor Johnny Xu

Johnny Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLYMERIC COATING FOR SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
    Publication number: 20240120180
    Abstract: A component in a semiconductor processing chamber is provided. An electrically conductive semiconductor or metal body has a CTE of less than 10.0×10?6/K. An intermediate layer is disposed over at least one surface of the body, the intermediate layer comprising a fluoropolymer. A perfluoroalkoxy alkane (PFA) layer is disposed over the intermediate layer to form the component.
    Type: Application
    Filed: February 25, 2022
    Publication date: April 11, 2024
    Inventors: Yuanping SONG, Johnny PHAM, Yiwei SONG, Lin XU, Christopher KIMBALL
  • Packaging
    Patent number: D666089
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: August 28, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Mark Armstrong, Dale Mark Nicholls, Terry Xu, Johnny Xu, Ronald Menno Victor Wienia
  • Packaging
    Patent number: D671398
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: November 27, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Mark Armstrong, Dale Mark Nicholls, Terry Xu, Johnny Xu, Ronald Menno Victor Wienia
  • Packaging
    Patent number: D671399
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: November 27, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Mark Armstrong, Dale Mark Nicholls, Terry Xu, Johnny Xu, Ronald Menno Victor Wienia
  • Packaging
    Patent number: D671400
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: November 27, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Mark Armstrong, Dale Mark Nicholls, Terry Xu, Johnny Xu, Ronald Menno Victor Wienia