Abstract: A sensor element is disclosed. In an embodiment, a sensor element with an increased level of integration includes a main part with a membrane and an edge zone arranged around the membrane and an electrically conductive layer having a first region arranged over the membrane of the main part and a second region arranged over the edge zone of the main part, wherein the membrane is a pressure-sensitive zone of the main part such that the membrane is configured to undergo deformation as a function of a pressure differential between an upper side and an underside of the membrane, wherein the edge zone is a pressure-insensitive zone, and wherein the electrically conductive layer is structured in the second region such that at least one temperature-dependent resistance is formed in the second region of the electrically conductive layer.

Abstract: A sensor element and a method for making a sensor element are disclosed. In an embodiment, a sensor element includes a main part with a membrane and an edge zone arranged around the membrane and an electrically conductive layer having a first region arranged over the membrane of the main part and a second region arranged over the edge zone of the main part, wherein the membrane is a pressure-sensitive zone of the main part such that the membrane is configured to undergo deformation as a function of a pressure differential between an upper side and an underside of the membrane, wherein the edge zone is a pressure-insensitive zone, and wherein the electrically conductive layer is structured in the second region such that at least one temperature-dependent resistance is formed in the second region of the electrically conductive layer.