Patents by Inventor Joichi Takada

Joichi Takada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing apparatus
    Patent number: 5931722
    Abstract: A chemical mechanical polishing apparatus is provided which is capable of polishing an essentially non-streaked mirrored surface in a highly efficient manner, and which is capable of achieving a degree of flatness of +/-0.1 mm or less.
    Type: Grant
    Filed: February 13, 1997
    Date of Patent: August 3, 1999
    Assignee: Tadahiro OHMI
    Inventors: Tadahiro Ohmi, Man Fujiki, Joichi Takada