Patents by Inventor Joichi Ushioda

Joichi Ushioda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate supporting table, method for producing same, and processing system
    Publication number: 20050120962
    Abstract: A plasma processing system has a susceptor, provided in a processing vessel, for supporting thereon a substrate. A process gas is supplied into the processing vessel to produce the plasma of the process gas. The susceptor has a dielectric film formed on a base, and a plurality of protrusions formed on the film. The protrusions of the susceptor are formed by thermal-spraying a ceramic onto the dielectric film via an aperture plate having a plurality of circular apertures.
    Type: Application
    Filed: January 11, 2005
    Publication date: June 9, 2005
    Inventors: Joichi Ushioda, Koichi Sato, Tsutomu Satoyoshi, Hiromichi Ito
  • Substrate supporting table,method for producing same, and processing system
    Publication number: 20020134511
    Abstract: A plasma processing system has a susceptor, provided in a processing vessel, for supporting thereon a substrate. A process gas is supplied into the processing vessel to produce the plasma of the process gas. The susceptor has a dielectric film formed on a base, and a plurality of protrusions formed on the film. The protrusions of the susceptor are formed by thermal-spraying a ceramic onto the dielectric film via an aperture plate having a plurality of circular apertures.
    Type: Application
    Filed: February 7, 2002
    Publication date: September 26, 2002
    Inventors: Joichi Ushioda, Koichi Sato, Tsutomu Satoyoshi, Hiromichi Ito