Patents by Inventor Jon Ballou

Jon Ballou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11127556
    Abstract: In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: September 21, 2021
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Costel Biloiu, Jon Ballou, James P. Buonodono
  • Publication number: 20200098540
    Abstract: In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
    Type: Application
    Filed: September 23, 2019
    Publication date: March 26, 2020
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Costel Biloiu, Jon Ballou, James P. Buonodono
  • Patent number: 10468226
    Abstract: In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: November 5, 2019
    Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Costel Biloiu, Jon Ballou, James P. Buonodono
  • Patent number: 9287085
    Abstract: A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: March 15, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Ernest E. Allen, Jon Ballou, Kevin M. Daniels, James P. Buonodono, Joseph P. Dzengeleski
  • Patent number: 9269536
    Abstract: An electrode adjustment method and apparatus are disclosed for use in workpiece processing. The assembly may include an electrode assembly having first and second ends. First and second manipulators may be coupled to the first and second ends. The manipulators may be used to selectively impart movement to the first and second ends of the electrode assembly to adjust one or more properties of an ion beam passing through the electrodes. The first and second manipulators may be independently actuatable so that the first and second ends of the electrode can be adjusted independent of one another. Methods of using the disclosed apparatus are also disclosed.
    Type: Grant
    Filed: April 12, 2013
    Date of Patent: February 23, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jon Ballou, Jeannot Morin, Manny Sieradzki, Joseph C. Olson
  • Publication number: 20150325405
    Abstract: A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen.
    Type: Application
    Filed: May 12, 2014
    Publication date: November 12, 2015
    Inventors: Ernest E. Allen, Jon Ballou, Kevin M. Daniels, James P. Buonodono, Joseph P. Dzengeleski
  • Publication number: 20130270450
    Abstract: An electrode adjustment method and apparatus are disclosed for use in workpiece processing. The assembly may include an electrode assembly having first and second ends. First and second manipulators may be coupled to the first and second ends. The manipulators may be used to selectively impart movement to the first and second ends of the electrode assembly to adjust one or more properties of an ion beam passing through the electrodes. The first and second manipulators may be independently actuatable so that the first and second ends of the electrode can be adjusted independent of one another. Methods of using the disclosed apparatus are also disclosed.
    Type: Application
    Filed: April 12, 2013
    Publication date: October 17, 2013
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Jon Ballou, Jeannot Morin, Manny Sieradzki, Joseph C. Olson
  • Publication number: 20070089283
    Abstract: An exemplary embodiment disclosed herein relates to an articulatable sealing device. The device includes a plurality of seal elements each of which is urgable against a seal-surface, a fixing member tightenable about a perimeter of the seal elements, and a retractor in operable communication with the plurality of seal elements and able to move the plurality of seal elements in a desired direction.
    Type: Application
    Filed: October 17, 2006
    Publication date: April 26, 2007
    Inventors: David Wilson, Jon Ballou
  • Patent number: 5735275
    Abstract: A tonometer for measuring intraocular pressure of an eye is described. The tonometer includes an eyepiece having a conduit extending through an outer surface. The outer surface is concave shaped to conform to an eyeball. The tonometer also includes a plunger extending through the conduit having a head at a first end and having a probe at a second end which extends beyond the outer surface of the eyepiece so as to contact the eyeball when the eyepiece is positioned to conform to the eyeball. The tonometer also includes a fluid reservoir having a top and a bottom. The bottom of the reservoir is sealed by a membrane that is in juxtaposition with the head of the plunger. In addition, the tonometer includes an indicator positioned in the fluid reservoir for measuring a level of fluid in the reservoir. The level of fluid in the reservoir is proportional to an intraocular pressure of the eyeball when the eyepiece is positioned to conform to the eyeball.
    Type: Grant
    Filed: June 13, 1996
    Date of Patent: April 7, 1998
    Inventors: Jon Ballou, Francis J. Porter, August O. Westner