Patents by Inventor Jon Chiang

Jon Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hot spot identification, inspection, and review
    Patent number: 9330987
    Abstract: A method for identifying, inspecting, and reviewing all hot spots on a specimen is disclosed by using at least one SORIL e-beam tool. A full die on a semiconductor wafer is scanned by using a first identification recipe to obtain a full die image of that die and then design layout data is aligned and compared with the full die image to identify hot spots on the full die. Threshold levels used to identify hot spots can be varied and depend on the background environments close thereto, materials of the specimens, defect types, and design layout data. A second recipe is used to selectively inspect locations of all hot spots to identify killers, and then killers can be reviewed with a third recipe.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: May 3, 2016
    Assignee: Hermes-Microvision, Inc.
    Inventors: Steve Lin, Wei Fang, Eric Ma, Zhonghua Dong, Jon Chiang, Yan Zhao, Chester Kuo, Zhongwei Chen
  • Hot Spot Identification, Inspection, and Review
    Publication number: 20150069232
    Abstract: A method for identifying, inspecting, and reviewing all hot spots on a specimen is disclosed by using at least one SORIL e-beam tool. A full die on a semiconductor wafer is scanned by using a first identification recipe to obtain a full die image of that die and then design layout data is aligned and compared with the full die image to identify hot spots on the full die. Threshold levels used to identify hot spots can be varied and depend on the background environments close thereto, materials of the specimens, defect types, and design layout data. A second recipe is used to selectively inspect locations of all hot spots to identify killers, and then killers can be reviewed with a third recipe.
    Type: Application
    Filed: September 9, 2014
    Publication date: March 12, 2015
    Inventors: Steve Lin, Wei Fang, Eric Ma, Zhonghua Dong, Jon Chiang, Yan Zhao, Chester Kuo, Zhongwei Chen