Abstract: A method of smoothing the sidewalls of an etched feature using reactive plasma milling. The method of smoothing reduces the depth of sidewall notching, which causes the roughness on the feature wall surface. The method comprises removing residual polymeric materials from the interior and exterior surfaces of said silicon-comprising feature and treating the interior surface of the silicon-comprising feature with a reactive plasma generated from a source gas while the silicon-comprising feature is biased with a pulsed RF power. The source gas includes a reagent which reacts with the silicon and an inert gas. The method provides a depth of a notch on the interior surface of about 500 nm or less.

Abstract: A method of smoothing the sidewalls of an etched feature using reactive plasma milling. The method of smoothing reduces the depth of sidewall notching, which causes the roughness on the feature wall surface. The method comprises removing residual polymeric materials from the interior and exterior surfaces of said silicon-comprising feature and treating the interior surface of the silicon-comprising feature with a reactive plasma generated from a source gas while the silicon-comprising feature is biased with a pulsed RF power. The source gas includes a reagent which reacts with the silicon and an inert gas. The method provides a depth of a notch on the interior surface of about 500 nm or less.

Abstract: A data transaction history management system and method for tracking and modifying data records associated with data transaction records stored in a database linked to a server. The database includes a plurality of data transaction records that each corresponds to a particular data transaction. A user interacts with a graphical user interface shown on a display of a client computer to generate an undo transaction request identifying a particular data transaction record to undo. The undo transaction request is transferred from the client computer to a server computer via a communication network. An application executing on the server undoes a transaction associated with the identified data transaction record to obtain an original transaction record, and stores the original transaction record and a new data transaction record in the database.