Patents by Inventor Jon Hamilton
Jon Hamilton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9141002Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: GrantFiled: March 4, 2013Date of Patent: September 22, 2015Assignee: KLA-Tencor CorporationInventors: Salam Harb, Kent Douglas, Marek Zywno, James Haslim, Jon Hamilton
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Publication number: 20130176548Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: ApplicationFiled: March 4, 2013Publication date: July 11, 2013Applicant: KLA-Tencor CorporationInventors: Salam Harb, Kent Douglas, Marek Zywno, James Haslim, Jon Hamilton
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Patent number: 8390789Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: GrantFiled: August 3, 2010Date of Patent: March 5, 2013Assignee: KLA-Tencor Technologies CorporationInventors: Salam Harb, Kent Douglas, Marek Zwyno, James Haslim, Jon Hamilton
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Patent number: 8237431Abstract: A speed sensor assembly includes a bearing having a first race, a second race, a plurality of ball bearings separating the first race from the second race, and a tone wheel coupled to the second race. The speed sensor assembly also includes a spacer abutting the first race and a sensor positioned adjacent the tone wheel.Type: GrantFiled: July 7, 2008Date of Patent: August 7, 2012Inventors: Terry Fruehling, Kelly Possehl, Brian Schneider, Matt Leroy, Tyler Kulig, Jon Hamilton, Jens Anton Heim
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Patent number: 7927018Abstract: The invention relates to a wheel bearing arrangement comprising an encoder arranged in a radial annular region between an inner part and an outer part.Type: GrantFiled: March 9, 2006Date of Patent: April 19, 2011Assignee: Schaeffler KGInventors: Jens Heim, Jon Hamilton
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Publication number: 20100295258Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: ApplicationFiled: August 3, 2010Publication date: November 25, 2010Applicant: KLA-Tencor CorporationInventors: Salam Harb, Kent Douglas, Marek Zwyno, James Haslim, Jon Hamilton
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Patent number: 7800735Abstract: Substrate support apparatus and methods are described. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: GrantFiled: May 30, 2006Date of Patent: September 21, 2010Assignee: KLA-Tencor Technologies CorporationInventors: Salam Harb, Kent Douglas, Marek Zwyno, James Haslim, Jon Hamilton
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Publication number: 20090051349Abstract: A speed sensor assembly includes a bearing having a first race, a second race, a plurality of ball bearings separating the first race from the second race, and a tone wheel coupled to the second race. The speed sensor assembly also includes a spacer abutting the first race and a sensor positioned adjacent the tone wheel.Type: ApplicationFiled: July 7, 2008Publication date: February 26, 2009Inventors: Terry Fruehling, Kelly Possehl, Brian Schneider, Matt Leroy, Tyler Kulig, Jon Hamilton, Jens Anton Heim
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Publication number: 20080166079Abstract: The invention relates to a wheel bearing arrangement comprising an encoder arranged in a radial annular region between an inner part and an outer part.Type: ApplicationFiled: March 9, 2006Publication date: July 10, 2008Inventors: Jens Heim, Jon Hamilton
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Publication number: 20070247778Abstract: Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion.Type: ApplicationFiled: May 30, 2006Publication date: October 25, 2007Applicant: KLA Tencor Technologies Corporation.Inventors: Salam Harb, Kent Douglas, Marek Zwyno, James Haslim, Jon Hamilton