Patents by Inventor Jon Rothe

Jon Rothe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR ROUTING WAFER PODS TO ALLOW PARALLEL PROCESSING
    Publication number: 20100232914
    Abstract: A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.
    Type: Application
    Filed: March 13, 2009
    Publication date: September 16, 2010
    Inventors: Diwaskar Adhikari, Raymond G. Goss, Carmen A. Maxim, Jon Rothe