Abstract: A multiple particle beam system comprises: a magnetic lens through which a plurality of individual charged particle beams pass; and a controller configured to control, such as dynamically control, the magnetic lens. The magnetic lens comprises a coil, a winding body and a pole shoe. The coil is arranged around the winding body and the winding body is a hollow body through which the plurality of individual particle beams pass. The coil, together with the winding body, is arranged within the pole shoe. The pole shoe has an opening through which a magnetic field created by the magnetic lens emerges from the pole shoe and interacts with the plurality of individual particle beams to obtain a lens effect. The winding body is electrically conductive and has an interruption, by which the electrical conductivity of the winding body is interrupted in the circumferential direction around the particle-optical axis.

Abstract: For aligning magnetic lenses in a multi-beam particle microscope, an electrically controllable mechanical alignment and fixing mechanism with an actuator system is provided for at least one global alignable magnetic lens. The mechanism is configured to mechanically align and mechanically fix a position of the at least one alignable magnetic lens in the particle optical beam path in a plane orthogonal to the optical axis of the multi-beam particle microscope. A controller is configured to electrically control the electrically controllable mechanical alignment and fixing mechanism.

Abstract: A scanner capable of determining 3D coordinates in the presence of bright background light includes a laser and a camera, the laser emitting light at a wavelength adjusted with a thermoelectric cooler, the camera passing the adjusted wavelength through a bandpass filter.