Abstract: For aligning magnetic lenses in a multi-beam particle microscope, an electrically controllable mechanical alignment and fixing mechanism with an actuator system is provided for at least one global alignable magnetic lens. The mechanism is configured to mechanically align and mechanically fix a position of the at least one alignable magnetic lens in the particle optical beam path in a plane orthogonal to the optical axis of the multi-beam particle microscope. A controller is configured to electrically control the electrically controllable mechanical alignment and fixing mechanism.

Abstract: A scanner capable of determining 3D coordinates in the presence of bright background light includes a laser and a camera, the laser emitting light at a wavelength adjusted with a thermoelectric cooler, the camera passing the adjusted wavelength through a bandpass filter.