Abstract: The invention relates to an apparatus for generating a thermodynamically cold plasma under standard atmospheric conditions by injecting microwave radiation at a frequency of >3 GHz into a plasma chamber (6) and subsequent superposition of a plurality of waves with constructive interference. The microwave radiation, which is generated in specifically geometrically arranged, preferably cylindrical resonant cavities in an evacuated anode block, is coupled out via hollow waveguides (5) and fed to a separated plasma chamber (6). Using the combination of a plurality of microwave generators (7) it is possible to inject a multiplicity of microwaves into the plasma chamber (6). A material stream, for example a process gas, can be fed in through an inlet (9) at the upper side of the plasma chamber and be discharged through an outlet for example in nozzle form at the lower side of the plasma chamber (6) and be fed to the surface that is to be processed.

Abstract: The invention relates to an apparatus for generating a thermodynamically cold plasma under standard atmospheric conditions by injecting microwave radiation at a frequency of >3 GHz into a plasma chamber (6) and subsequent superposition of a plurality of waves with constructive interference. The microwave radiation, which is generated in specifically geometrically arranged, preferably cylindrical resonant cavities in an evacuated anode block, is coupled out via hollow waveguides (5) and fed to a separated plasma chamber (6). Using the combination of a plurality of microwave generators (7) it is possible to inject a multiplicity of microwaves into the plasma chamber (6). A material stream, for example a process gas, can be fed in through an inlet (9) at the upper side of the plasma chamber and be discharged through an outlet for example in nozzle form at the lower side of the plasma chamber (6) and be fed to the surface that is to be processed.