Patents by Inventor Jonathan C. Pickering

Jonathan C. Pickering has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of nano-crystal silicon using a single wafer chamber
    Patent number: 7265036
    Abstract: Numerous embodiments of a method for depositing a layer of nano-crystal silicon on a substrate. In one embodiment of the present invention, a substrate is placed in a single wafer chamber and heated to a temperature between about 300° C. to about 490° C. A silicon source is also fed into the single wafer chamber.
    Type: Grant
    Filed: July 23, 2004
    Date of Patent: September 4, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Sheeba J. Panayil, Ming Li, Shulin Wang, Jonathan C. Pickering