Abstract: An exemplary semiconductor processing system may include a processing chamber and a first pressure regulating device coupled with the processing chamber. A second pressure regulating device may also be coupled with the processing chamber separate from the first pressure regulating device. A first pump may be fluidly coupled with the first pressure regulating device and fluidly isolated from the second pressure regulating device. A second fluid pump may be fluidly coupled with the second pressure regulating device.

Abstract: Apparatus for a pump assembly and a fluid metering unit. The pump assembly can include a diaphragm with a portion of a body being molded over a portion of each one of a plurality of pistons. The pump assembly can include a wobble plate, a lower housing, and a spring positioned between the wobble plate and the lower housing. A valve housing can include pumping chambers with side walls that are angled. The fluid metering unit can include a bayonet locking mechanism and/or a seal between a housing and a flow meter. The controller can be calibrated according to the type and/or temperature of the fluid.

Abstract: Apparatus for a pump assembly and a fluid metering unit. The pump assembly can include a diaphragm with a portion of a body being molded over a portion of each one of a plurality of pistons. The pump assembly can include a wobble plate, a lower housing, and a spring positioned between the wobble plate and the lower housing. A valve housing can include pumping chambers with side walls that are angled. The fluid metering unit can include a bayonet locking mechanism and/or a seal between a housing and a flow meter. The controller can be calibrated according to the type and/or temperature of the fluid.

Abstract: The pump of the present invention preferably includes a housing having an inlet port, an outlet port and a chamber located in fluid communication with the inlet port and the outlet port. A diaphragm is sealingly secured in the chamber and, together with the housing, define a fluid passageway from the inlet port to the outlet port. An electromagnetic assembly or other driving device is preferably secured to the housing and is positioned to move the diaphragm in order to pump fluid through the pump. In some preferred embodiments, the electromagnetic assembly includes a plunger positioned and adapted to move the diaphragm against the biasing force of a spring. Improved diaphragms and diaphragm features are also disclosed, including a two-part diaphragm structure, diaphragm sealing portions for sealing the fluid chamber from driving and biasing assemblies of the pump, and inherently biased diaphragms.

Abstract: The pump of the present invention preferably includes a housing having an inlet port, an outlet port and a chamber located in fluid communication with the inlet port and the outlet port. A diaphragm is sealingly secured in the chamber and, together with the housing, define a fluid passageway from the inlet port to the outlet port. An electromagnetic assembly or other driving device is preferably secured to the housing and is positioned to move the diaphragm in order to pump fluid through the pump. In some preferred embodiments, the electromagnetic assembly includes a plunger positioned and adapted to move the diaphragm against the biasing force of a spring. Improved diaphragms and diaphragm features are also disclosed, including a two-part diaphragm structure, diaphragm sealing portions for sealing the fluid chamber from driving and biasing assemblies of the pump, and inherently biased diaphragms.