Patents by Inventor Jonathan Erik Larson

Jonathan Erik Larson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7834994
    Abstract: An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
    Type: Grant
    Filed: October 21, 2008
    Date of Patent: November 16, 2010
    Assignee: Applied Materials, Inc.
    Inventors: William A. Bagley, Paohuei Lee, Kyung-Tae Kim, Sam-Kyung Kim, Toshio Kiyotake, Sam Kim, Takayuki Matsumoto, Jonathan Erik Larson, Makoto Inagawa, James Hoffman, Billy C. Leung
  • Publication number: 20090050270
    Abstract: An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
    Type: Application
    Filed: October 21, 2008
    Publication date: February 26, 2009
    Inventors: William A. Bagley, Paohuei Lee, Kyung-Tae Kim, Sam-Kyung Kim, Toshio Kiyotake, Sam Kim, Takayuki Matsumoto, Jonathan Erik Larson, Makoto Inagawa, James Hoffman, Billy C. Leung
  • Patent number: 7440091
    Abstract: An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface.
    Type: Grant
    Filed: October 26, 2004
    Date of Patent: October 21, 2008
    Assignee: Applied Materials, Inc.
    Inventors: William A. Bagley, Paohuei Lee, Kyung-Tae Kim, Sam-Kyung Kim, Toshio Kiyotake, Sam Kim, Takayuki Matsumoto, Jonathan Erik Larson, Makoto Inagawa, James Hoffman, Billy C. Leung