Abstract: An ultra-low noise sensor for magnetic fields comprises a mechanically resonant structure having a magnetized proof mass. The displacement of the proof mass due to a magnetic field provides a high resolution and highly amplified measurement of magnetic field fluctuations near the resonance frequency. A flux modulator may be used with the resonant structure to amplify magnetic fluctuations in a non-resonant frequency band. The resonant structure, combined with a high resolution readout device and a frequency-compensating numerical processor, can amplify magnetic fluctuations in a broad range of frequencies. A solenoid coil surrounding the resonant structure may be used to null the quasi-static earth's magnetic field and thereby increase the dynamic range of the sensor. Cryogenically cooling the resonant structure can improve the resolution of the sensor. A magnetometer that embodies features of the present invention is miniaturized and has improved amplification and resolution at room temperature.

Abstract: A novel spatial light modulator system has a high fill factor MEMS array of tilting mirrors used to attenuate wavelength channels in an optical network and an interface control circuit controlling the tilting mirror array via received control signals. The control signals include definitions of the wavelength channels and desired attenuation. This control circuit may or may not be on the same chip as the mirror array. Each mirror is supported by one or more flexures, located symmetrically or asymmetrically with respect to the mirror's center of gravity, providing single-axis or two-axis rotation. Stiffener ribs at mirror edges provide a flatter mirror. Landing electrodes held at the same potential as the mirror prevent stiction, while strain relief slots relieve stress on the mirror or flexures. Mirrors fabricated from polysilicon or metal are polished flat using a CMP technique. This SLM design is non-interferometric, therefore increased angular tilt provides increased attenuation.

Abstract: A latching mechanism is provided for selectively latching mirrors in an optical switch. The mirrors are selectively movable between rest and actuated positions. The latching mechanism provides stable latching of mirrors in an actuated position, i.e., without power being applied to maintain the actuated state.

Abstract: The effectiveness of magnetic damping on a MEMS device rotating in a high magnetic field or field gradient is described and analyzed for three preferred embodiments: (1) a conductive plate rotating about a single axis in a uniform magnetic field; (2) a conductive plate rotating about two axes in a high magnetic field gradient region; and (3) a conductive rectangular plate rotating in a magnetic field. Control of a rotational MEMS device such as a mirror necessitates fast response and settling times. Optimal response is achieved by reducing the mechanical quality factor (Q) close to one (1). Magnetic damping is found to be an effective means of reducing the Q factor of MEMS rotating mirrors without introducing hysteresis, narrow gaps or fluids. Methods to reduce the Q factor include reducing mirror mass and moment of inertia, increasing the conductive layer thickness, and increasing ? ? ? ? or magnetic flux density variation as a function of angle.

Abstract: A monolithic or dual monolithic magnetic device or apparatus having an array of formations such as protruding or raised nubs wherein adjacent nubs have the same or opposite polarity to produce a high magnetic field gradient in the vicinity of the nubs is described. In lieu of nubs, the use of a magnetic device with thru-holes, blind holes, filled holes, or iron flux concentrators is also detailed, wherein all embodiments result in regions of high magnetic field gradient. Apparatus and methods for spot-poling a magnet array are also illustrated. An application of an array of MEMS actuators using the magnets of the present invention to produce high field gradient at precise locations is described. A further application of a biochemical separation unit containing a magnetic array and micro-fluidic channels for separating out magnetic particles tagged with bio-specific molecules for sensing the presence of a disease or specified chemicals is also described.

Abstract: One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector).

Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

Abstract: The effectiveness of magnetic damping on a MEMS device rotating in a high magnetic field or field gradient is described and analyzed for three preferred embodiments: (1) a conductive plate rotating about a single axis in a uniform magnetic field; (2) a conductive plate rotating about two axes in a high magnetic field gradient region; and (3) a conductive rectangular plate rotating in a magnetic field. Control of a rotational MEMS device such as a mirror necessitates fast response and settling times. Optimal response is achieved by reducing the mechanical quality factor (Q) close to one (1). Magnetic damping is found to be an effective means of reducing the Q factor of MEMS rotating mirrors without introducing hysteresis, narrow gaps or fluids.

Abstract: A monolithic or dual monolithic magnetic device or apparatus having an array of formations such as protruding or raised nubs wherein adjacent nubs have the same or opposite polarity to produce a high magnetic field gradient in the vicinity of the nubs is described. In lieu of nubs, the use of a magnetic device with thru-holes, blind holes, filled holes, or iron flux concentrators is also detailed, wherein all embodiments result in regions of high magnetic field gradient. Apparatus and methods for spot-poling a magnet array are also illustrated.

Abstract: A latching mechanism is provided for selectively latching mirrors in an optical switch. The mirrors are selectively movable between rest and actuated positions. The latching mechanism provides stable latching of mirrors in an actuated position, i.e., without power being applied to maintain the actuated state.

Abstract: One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector).

Abstract: A device for rapid optical switching includes a membrane having a reflecting surface on at least a portion of an upper surface of the membrane, first and second spacers at opposing ends of the membrane for securing the membrane to a substrate, whereby the membrane is spaced apart from the substrate, and first and second actuation electrodes positioned on the same side of the membrane and spaced a distance from the membrane so as to form a gap therebetween, whereby actuation of the actuation electrodes applies a force to the membrane to tilt the reflective portion of the membrane at an angle with respect to the substrate.

Abstract: An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

Abstract: A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member.