Abstract: The present disclosure relates to an engineered, additively manufactured, microfluidic cellular structure formed from a plurality of cells, wherein the cells are each formed from a plurality of interconnected elements. The cells have voids and each cell is open at upper ends thereof. The cells each communicate at a point below its upper end with a common channel. The cells are each configured to accept a fluid and operate to channel the fluid into the common channel and to hold the fluid received therein for later selective withdrawal from the structure.

Abstract: A method includes forming a planarization layer to a position below an upper transistor device region of a base structure of an electronic device and above a lower transistor device region of the base structure. The base structure includes a plurality of features. The method further includes forming spacer material along the base structure and the planarization layer, modifying the spacer material formed along bottom trenches of the base structure to obtain modified spacer material, and forming a spacer layer by using a wet etch process to remove the modified spacer material. Modifying the spacer material formed along the bottom trenches of the base structure to obtain the modified spacer material includes performing a dry etch process targeting the spacer material formed along the bottom trenches of the base structure.