Patents by Inventor Jonathan S. Erhmann

Jonathan S. Erhmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for high-speed, precise micromachining an array of devices
    Patent number: 7871903
    Abstract: A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. Beam scanning and deflection are both used to distribute beam spots to elements of an array of elements for selective processing. The deflection can be performed with a solid state deflector.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: January 18, 2011
    Assignee: GSI Group Corporation
    Inventors: Bruce L. Couch, Jonathan S. Erhmann, Yun Fee Chu, Joseph V. Lento, Shepard D. Johnson