Abstract: A method to compensate for stress deflection in a compound microprobe that includes a substrate, a microcantilever extending outwardly from the substrate, and a film formed on the microcantilever. The method preferably comprises the steps of determining an amount of stress-induced deflection of the microcantilever, and then mounting the microprobe so as to compensate for the stress-induced deflection. The mounting step preferably includes selecting a compensation piece based upon the amount of stress-induced deflection, where the compensation piece is a wedge generally aligning the microcantilever with a deflection detection apparatus. In general, the step of selecting the compensation piece includes correcting an angle between a longitudinal axis of the microcantilever and the substrate so as to insure that light reflected from the microcantilever during operation contacts a detector of a deflection detection apparatus.

Abstract: A method of fabricating carbon nanotubes in a nanotube growth apparatus including executing a nanotube growth process recipe and monitoring a safety condition during the executing step. The executing step is interlocked to the monitoring step such that the executing step can be aborted based on the output of the monitoring step.

Abstract: A carbon nanotube fabricating system and method that employs control automation to ensure safety during the fabrication of nanotubes in a variety of applications. A method of producing carbon nanotubes in a process chamber includes executing a nanotube growth recipe and purging oxygen from the process chamber in response to the executing step. The purge step is performed by flowing an inert gas through the process chamber at appropriate times and for predetermined durations during the fabrication process.