Abstract: To improve pressure measurement reliability and safety of a battery cell and finely control pressure, the disclosure of the present application provides a battery cell pressing device comprising: a battery cell; a plurality of upper plates disposed above the battery cell; a plurality of lower plates disposed below the battery cell; a first pressing member interposed between the plurality of upper plates; and a second pressing member interposed between the plurality of lower plates, wherein a magnetic force is generated at the first pressing member and the second pressing member by an applied current.

Abstract: Provided is an apparatus for treating a substrate, the apparatus including: an equipment front end module including a load port and a transfer frame; a process chamber for performing a process treatment on a substrate; and a load lock chamber disposed in a transfer path of the substrate transferred between the transfer frame and the process chamber, in which the load lock chamber includes: a housing having an interior space; a compartmentalizing plate for compartmentalizing the interior space into a first space, and a second space independent of the first space; and an aligning unit for aligning a notch of the substrate provided in any one of the first space and the second space.

Abstract: A ball valve comprises a main body having a chamber, inlet and outlet pipes and an extension tube, the chamber having a hollow interior, the extension tube being connected to the hollow interior of the chamber and the inlet and outlet pipes being connected to the hollow interior of the chamber, a switching member having a ball and a rotary shaft, the ball having a channel formed therein correspondingly to the inlet and outlet pipes and the rotary shaft being connected to the ball, and a sealing member having a channel securing hole corresponding to the channel of the ball, the sealing member being formed of elastic material in a cylindrical shape for containing the ball therein.