Abstract: Disclosed is a lifting device and an electrode sheet transfer apparatus using the same. The lifting device is a device for lifting a sheet-shaped member, and includes a main suction plate configured to make surface contact with a central portion of the sheet-shaped member and adsorb the central portion; a sub suction plate configured to make surface contact with an edge portion of the sheet-shaped member located outside the central portion and adsorb the edge portion; and a lifting unit connected to the main suction plate and the sub suction plate respectively to raise or lower the main suction plate and the sub suction plate, wherein the lifting unit is configured to lift the main suction plate and the sub suction plate when the main suction plate and the sub suction plate adsorb the sheet-shaped member, so that the sub suction plate is raised before the main suction plate.

Abstract: Disclosed is a lifting device and an electrode sheet transfer apparatus using the same. The lifting device is a device for lifting a sheet-shaped member, and includes a main suction plate configured to make surface contact with a central portion of the sheet-shaped member and adsorb the central portion; a sub suction plate configured to make surface contact with an edge portion of the sheet-shaped member located outside the central portion and adsorb the edge portion; and a lifting unit connected to the main suction plate and the sub suction plate respectively to raise or lower the main suction plate and the sub suction plate, wherein the lifting unit is configured to lift the main suction plate and the sub suction plate when the main suction plate and the sub suction plate adsorb the sheet-shaped member, so that the sub suction plate is raised before the main suction plate.

Abstract: An EGR filter is configured for preventing clogging, which is disposed in an EGR line which recirculates a portion of the exhaust gas exhausted from an engine to the engine, and mounted in an EGR filter assembly which filters foreign material contained in the exhaust gas, wherein the EGR filter is woven to the twill weave with a weft and a warp of metal material.

Abstract: An EGR filter is configured for preventing clogging, which is disposed in an EGR line which recirculates a portion of the exhaust gas exhausted from an engine to the engine, and mounted in an EGR filter assembly which filters foreign material contained in the exhaust gas, wherein the EGR filter is woven to the twill weave with a weft and a warp of metal material.

Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.

Abstract: A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.

Abstract: A plate for supporting a light path refraction plate arranged in front of a color coupled device in a manner that the light path refraction plate is rotated in multi-directions, and an image processing device including the plate, which is capable of improving the resolution of the color coupled device by successively projecting lights of an object to a plurality of places on a pixel of the color coupled device. The plate includes a frame for supporting the light path refraction plate, a first holder for rotatably supporting the frame in a second direction, a second holder for rotatably supporting the first holder in a first direction which is in perpendicular relation with respect to the second direction, a first connecting section for connecting the first and second holders, and a second connecting section for connecting the frame and the first holder. The image processing device includes the light path refraction plate, the plate, and the driving section.